IMT Masken und Teilugen AG
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Frequently Asked Questions

The principle involves using thin film waveguides with sub-micrometric gratings to couple light and utilize the small extension of the evanescent field above the waveguide for highly sensitive detection.

The waveguides with gratings offer high-quality gratings with excellent homogeneity, low defect ratio (even for large chip formats), high repeatability at volume production, and competitive up-front costs. They can also be combined with fluidic channels.

Waveguides with gratings are commonly used in life science sensing applications and for the analysis of living molecules in real time.

The benefits include high-quality gratings with excellent homogeneity, low defect ratio (even for large chip formats), high repeatability at volume production, and competitive up-front costs. They can also be combined with fluidic channels.

The substrate material is Schott D263T (or equivalent) with a refractive index of 1.52 at 633 nm. The waveguide material is Ta2O5 (or other oxides) with a refractive index of 2.12 at 633 nm. The waveguide thickness is 100 - 500 nm with an attenuation of < 3 dB/cm at 532 nm. The light coupling grating is a binary phase grating with a period of 300 - 1000 nm and a depth of 10 - 100 nm.

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