16 cm RF Ion Beam Source
Description
Our 16cm RF high current (HC) ion beam source is an industry workhorse. When paired with our IBEAM power supply (and its internal generator) it has output capacity 800mA. This dynamic and versatile source can satisfy a huge array of needs in deposition and large-scale Ion assist processes. Available with standard molybdenum, collimated graphite, or titanium grids, this source can be used in almost any type of contamination-sensitive ion beam process. The source provides a 16cm ion beam which is then shaped by the choice of grids. Convergent, divergent, collimated, and even multi-focal point grids are available with this source.
16 cm RF Ion Beam Source
Specifications |
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| Beam Diameter: | 160 mm |
| Energy Range: | 1-1keV |
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Frequently Asked Questions
The ion beam provided by the 16 cm RF Ion Beam Source is shaped by the choice of grids. Convergent, divergent, collimated, and even multi-focal point grids are available with this source.
Yes, the 16 cm RF Ion Beam Source can be used in almost any type of contamination-sensitive ion beam process.
What is the output capacity of the 16 cm RF Ion Beam Source when paired with the IBEAM power supply?
The 16 cm RF Ion Beam Source has an output capacity of 800mA when paired with the IBEAM power supply.
The 16 cm RF Ion Beam Source can satisfy a huge array of needs in deposition and large-scale Ion assist processes.
The 16 cm RF Ion Beam Source is available with standard molybdenum, collimated graphite, or titanium grids.