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Ion Gun Systems G-1
Beam Imaging Solutions
Beam Imaging Solutions (BIS) has two Ion Gun systems to offer. Each Gun includes an ion source assembly, heat sink, acceleration and focusing system, vertical deflection plates, a 6″ long velocity filter and a velocity filter guard ring control unit. Components are assembled in a vacuum housing fitted with a flange for mounting ...
  • Beam Diameter: -- mm
  • Energy Range: 0.5 - 10 keV
Data Sheet
6 cm RF Ion Beam Source
Plasma Process Group
Our smallest ion beam source, the 6cm RF can provide all the benefits of radio frequency ion source technology in a smaller, more compact, and less expensive form. With a maximum beam current of 200mA at 1500V, the 6cm source is ideal for research and smaller production systems. This source also finds a home in etch and ion beam ...
  • Beam Diameter: 60 mm
  • Energy Range: 0.5 - 1.5 keV
Data Sheet
12 cm RF Ion Beam Source
Plasma Process Group
Used primarily for ion assist, the 12cm RF ion beam source also finds great value as a deposition source in smaller systems or an ion beam figuring (IBF) source for large substrates. Providing additional service as a pre-clean source for substrates, the 12cm source is one of the most versatile options available. As with all RF ion ...
  • Beam Diameter: 120 mm
  • Energy Range: 0.5 - 1.5 keV
Data Sheet
16 cm RF Ion Beam Source
Plasma Process Group
Our 16cm RF high current (HC) ion beam source is an industry workhorse. When paired with our IBEAM power supply (and its internal generator) it has output capacity 800mA. This dynamic and versatile source can satisfy a huge array of needs in deposition and large-scale Ion assist processes. Available with standard molybdenum, ...
  • Beam Diameter: 160 mm
  • Energy Range: 1 - 1 keV
Data Sheet
3kW Ion Source
TELEMARK
The ST3000 Gridless End-Hall Ion Source has been specially developed to provide a cost effective solution for ion assisted vacuum processes for medium to large sized deposition systems. The ST3000 provides an extremely reliable and maintenance-free 3kW sourcefor many applications in PVD processes. The compact design and rugged ...
  • Beam Diameter: 115 mm
  • Energy Range: 0.3 - 0.3 keV
Data Sheet
1.5kW Ion Source
TELEMARK
The ST55 Gridless End-Hall Ion Source has been specially developed to provide a cost effective solution for ion assisted vacuum processes for medium to large sized deposition systems. The ST55 provides an extremely reliable and maintenance-free 1.5kW source for many applications in PVD processes. The compact design and rugged ...
  • Beam Diameter: 75 mm
  • Energy Range: 0.23 - 0.23 keV
Data Sheet
1kW Ion Source
TELEMARK
The XIAD Gridless End-Hall Ion Source has been specially developed to provide a cost effective solution for ion assisted processes for small to medium sized deposition systems. The XIAD provides an extremely reliable and maintenance-free 1kW source for many applications in PVD processes.The compact design and rugged construction ...
  • Beam Diameter: 60 mm
  • Energy Range: 0.2 - 0.2 keV
Data Sheet