6 cm RF Ion Beam Source
Description
Our smallest ion beam source, the 6cm RF can provide all the benefits of radio frequency ion source technology in a smaller, more compact, and less expensive form. With a maximum beam current of 200mA at 1500V, the 6cm source is ideal for research and smaller production systems. This source also finds a home in etch and ion beam figuring (IBF) systems with its highly divergent or highly convergent grid options. The body of this source is not water-cooled, thus requiring only two feedthroughs, RF power and DC Bias/Gas. Designed around the flexibility of internal mounting, the 6cm source is also capable of being mounted directly to a flange for process flexibility. As with all RF sources, the 6cm source can be run with both inert and reactive gases, making the 6cm ideal for any ion beam process.
6 cm RF Ion Beam Source
Specifications |
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| Beam Diameter: | 60 mm |
| Energy Range: | 0.5-1.5keV |
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Frequently Asked Questions
Yes, the 6cm RF ion beam source is designed around the flexibility of internal mounting and is also capable of being mounted directly to a flange for process flexibility.
The body of the 6cm RF ion beam source is not water-cooled, thus requiring only two feedthroughs, RF power and DC Bias/Gas.
The 6cm RF ion beam source is ideal for research and smaller production systems, as well as etch and ion beam figuring (IBF) systems with its highly divergent or highly convergent grid options.
The maximum beam current of the 6cm RF ion beam source is 200mA at 1500V.
As with all RF sources, the 6cm RF ion beam source can be run with both inert and reactive gases, making it ideal for any ion beam process.