Description
The EQ-10R-HP from Energetiq Technology is a high-brightness extreme ultraviolet (EUV) light source designed for demanding optical metrology, actinic inspection, and materials characterization applications. It builds on Energetiq’s Electrodeless Z-Pinch™ plasma platform to deliver increased power, stability, and reliability for advanced semiconductor and scientific measurement systems.
The EQ-10R-HP offers higher EUV brightness and output than standard EQ-10R sources, enabling faster data acquisition and improved precision, while maintaining long lifetimes and robust performance in demanding environments.
EQ-10R-HP Electrodeless Z-Pinch™ EUV Source
Specifications
| EUV Output Power (2pi Steradian): | 20 W |
|---|---|
| Pulse Repetition Rate: | 1200 – 2500 Hz |
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Features
- High in-band EUV power output (~20 W class) for improved measurement throughput
- Stable, repeatable emission suitable for metrology and inspection
- Electrodeless design minimizes debris and extends operational lifetime
- Optimized for high-repetition operation in production and R&D environments
- Designed for integration into advanced EUV optical systems
Applications
- Semiconductor wafer metrology and inspection
- Actinic optical testing and calibration
- EUV resist and materials research
- Optical component characterization
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