EQ-10HP High Power EUV Light Source
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Ships from:
United States
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Sold by:
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On FindLight:
since 2017
Description
The EQ-10HP is an advanced EUV light source crafted by Energetiq, renowned for its compact design and ease of use. This high-power device utilizes the innovative Electrodeless Z-Pinch™ technology, employing Xenon gas to deliver exceptional performance. It stands out as a reliable and cost-effective solution, making it a preferred choice for the EUV community. Its robust design and low operational costs make it an ideal tool for metrology and research applications, where precision and reliability are paramount.
Building on the successful foundation of Energetiq’s EQ-10 series, the EQ-10HP offers significant enhancements in power and brightness. It operates at higher input powers, providing double the EUV output compared to its predecessors. This increased efficiency is particularly beneficial for imaging applications, such as EUV mask inspection, where clarity and detail are critical. The EQ-10HP’s superior performance ensures it meets the demanding needs of advanced technological environments.
The modular design of the EQ-10HP allows seamless integration into various process tools. It includes essential components like the Electrodeless Z-Pinch™ source assembly, vacuum and gas subsystems, power delivery subsystem, and control electronics. Capable of delivering up to 20 Watts of in-band EUV into 2π steradians, the EQ-10HP operates continuously at pulse repetition rates of up to 2.5 kHz. This flexibility and power make it a versatile tool for a range of scientific and industrial applications.
Energetiq’s Electrodeless Z-Pinch™ technology is a standout feature, offering a unique approach to generating EUV light. Unlike traditional methods that use electrodes, Energetiq’s technology inductively couples the current into the plasma, avoiding direct contact with high-temperature plasma. This method significantly reduces debris and minimizes heat load, enhancing the system’s longevity and performance. The spatial stability and consistent power output of this technology ensure reliable results, reinforcing the EQ-10HP as a leading choice for EUV light sources.
EQ-10HP High Power EUV Light Source
Specifications |
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| EUV Output Power (2pi Steradian): | 20 W |
| Pulse Repetition Rate: | 1200 – 2500 Hz |
Features
- High Power EUV Light Source: The EQ-10HP delivers up to 20 Watts of in-band EUV into 2π steradians, providing significant brightness for demanding applications.
- Electrodeless Z-Pinch™ Technology: Utilizes Energetiq’s patented technology, offering stable and repeatable power output with minimal debris due to its electrode-free design.
- Compact and Reliable: Designed for ease of use and cost-effectiveness, making it ideal for metrology and research applications.
- High Pulse Repetition Rate: Capable of operating continuously at pulse repetition rates of up to 2.5 kHz.
- Low Cost of Ownership: Features a low Xenon flow rate and minimized consumable costs, ensuring affordability over time.
- Modular Design: Ready for integration into process tools, including vacuum and gas subsystems, power delivery, and control electronics.
- Proven Reliability: CE Mark and SEMI S2-0703 compliant, ensuring high standards of safety and quality.
Applications
- EUV Mask Inspection: Enables high-resolution defect detection and pattern validation.
- Advanced EUV Metrology: Provides stable, high-brightness EUV light for precise measurements.
- EUV Resist Development: Supports research and development of next-generation resists.
- EUV Microscopy: Delivers bright, stable EUV light for high-resolution microscopy applications.
Frequently Asked Questions
The EQ-10HP is a compact, easy-to-use, reliable, and cost-effective EUV light source based on Energetiq’s proven Electrodeless Z-Pinch™ technology using Xenon gas.
The EQ-10HP has a performance of 20W into 2π using Xenon, up to 2.5 kHz pulse rate, small plasma size, and low debris. It also has a low cost of ownership with low Xenon flow rate, minimized consumable cost, and small footprint. It has proven reliability with patented Electrodeless Z-Pinch™ technology and is CE Mark and SEMI S2-0703 compliant.
The EQ-10HP is uniquely suited for metrology and research applications, including EUV Mask Inspection, EUV Metrology, EUV Resist Development, and EUV Microscopy.
The EQ-10HP delivers double the output EUV power and significantly higher brightness, making it suitable for imaging applications such as EUV mask inspection. It is capable of delivering up to 20 Watts of in-band EUV into 2π stera- dians and will run continuously at pulse repetition rates of up to 2.5 kHz.
Energetiq’s unique technology is based on a Z-pinch plasma, but it avoids electrodes entirely by using their patented Electrodeless Z-Pinch™ technology. This technology has been shown to be effective at producing EUV and SXR light.