EQ-10 Compact EUV Source
Description
The EQ-10 is a compact, easy-to-use, reliable, and cost-effective light source, based on Energetiq’s proven Electrodeless Z-Pinch™ technology using Xenon gas. The EQ-10 EUV source is uniquely suited for metrology and research applications. The EQ-10 has become the workhorse EUV source for the EUV community, through its proven reliability, ease of use, and low operating cost.
The Energetiq EQ-10 EUV Source’s modular design makes it ready to be integrated in a process tool. The system includes the electrodeless Z-pinch source assembly, vacuum and gas subsystems, power delivery subsystem, and control electronics. The EQ-10 is capable of delivering up to 10 Watts of in-band EUV into 2π steradians and will run continuously at pulse repetition rates of up to 2 kHz.
EQ-10 Compact EUV Source
Specifications |
|
|---|---|
| Central Wavelength: | 13.5 nm |
| Spectral Bandwidth: | .27 nm |
| EUV Output Power (2pi Steradian): | 10 W |
| Pulse Repetition Rate: | 1200-2000Hz |
Features
Performance
10W into 2π using Xenon
Up to 2 kHz pulse rate
Small plasma size
Low debris
Low Cost of Ownership
Low Xenon flow rate
Minimized consumable cost
Small footprint
Proven Reliability
Patented Electrodeless Z-Pinch™ technology
CE Mark and SEMI S2-0703 compliant
Applications
EUV Resist Development
EUV Inspection
EUV Microscopy
For pricing, technical or any other questions please contact the supplier
- No registration required
- No markups, no fees
- Direct contact with supplier
Contact Supplier
How to order?
-
Ships from:
United States
-
Sold by:
-
On FindLight:
since 2017
Frequently Asked Questions
The EQ-10 is a compact, easy-to-use, reliable, and cost-effective light source, based on Energetiq’s proven Electrodeless Z-Pinch™ technology using Xenon gas.
The EQ-10 EUV source is uniquely suited for metrology and research applications, such as EUV Metrology, EUV Resist Development, EUV Inspection, and EUV Microscopy.
The EQ-10 is capable of delivering up to 10 Watts of in-band EUV into 2π steradians and will run continuously at pulse repetition rates of up to 2 kHz.
Energetiq’s unique technology is based on a Z-pinch plasma, but it avoids electrodes entirely by inductively coupling the current into the plasma. The plasma in the Energetiq source is magnetically confined away from the source walls, minimizing the heat load and reducing debris.
The EQ-10 has low cost of ownership due to low Xenon flow rate, minimized consumable cost, and small footprint. It also has proven reliability with patented Electrodeless Z-Pinch™ technology and CE Mark and SEMI S2-0703 compliant.