EQ-10 Compact EUV Source
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Ships from:
United States
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Sold by:
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On FindLight:
since 2017
Description
The EQ-10 is an innovative compact EUV light source designed for reliability and cost-effectiveness. Developed by Energetiq, it harnesses the power of the patented Electrodeless Z-Pinch™ technology, which utilizes Xenon gas. This state-of-the-art light source has become an essential tool in the EUV community, renowned for its dependable performance, user-friendly operation, and low operating costs. The EQ-10 is particularly well-suited for metrology and research, making it a versatile choice for various scientific and industrial applications.
One of the standout attributes of the EQ-10 is its modular design, which allows for seamless integration into existing process tools. The system comprises several critical components, including the electrodeless Z-pinch source assembly, vacuum and gas subsystems, power delivery subsystem, and control electronics. This sophisticated setup enables the EQ-10 to deliver up to 10 Watts of in-band EUV radiation into 2π steradians, with the capability to operate continuously at pulse repetition rates of up to 2 kHz. Such performance ensures that users can rely on consistent and powerful EUV output for their specific needs.
Energetiq's Electrodeless Z-Pinch™ technology is a groundbreaking approach that distinguishes the EQ-10 from other EUV sources. By inductively coupling the current into the plasma, the technology eliminates the need for electrodes, which are prone to melting and debris production. This method not only enhances the spatial stability of the plasma but also ensures stable, repeatable power output while minimizing heat load and debris. This innovative design makes the EQ-10 a reliable and efficient choice for those seeking high-quality EUV light sources.
EQ-10 Compact EUV Source
Specifications |
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| Central Wavelength: | 13.5 nm |
| Spectral Bandwidth: | 27 nm |
| EUV Output Power (2pi Steradian): | 10 W |
| Pulse Repetition Rate: | 1200 – 2000 Hz |
Features
- High EUV Power Output: Delivers 10W into 2π steradians at 13.5 nm for demanding EUV applications
- Fast Pulse Rate: Operates continuously at pulse repetition rates up to 2 kHz
- Electrodeless Z-Pinch™ Technology: Ensures minimal debris with stable and repeatable power output
- Low Operating Costs: Features low Xenon flow rate, minimizing consumable costs
- Compact Modular Design: Easily integrates into process tools with small system footprint
- Proven Reliability: Trusted by the EUV community for metrology, inspection, and research applications
- Compliance Certified: Meets CE Mark and SEMI S2-0703 standards for operational safety
Applications
- EUV Metrology: Ideal for precise EUV measurement and calibration systems
- EUV Resist Development: Supports advanced resist formulation and evaluation
- EUV Inspection: Enables high-resolution defect inspection and analysis
- EUV Microscopy: Suitable for imaging nanoscale structures with high stability
Frequently Asked Questions
The EQ-10 is a compact, easy-to-use, reliable, and cost-effective light source, based on Energetiq’s proven Electrodeless Z-Pinch™ technology using Xenon gas.
The EQ-10 EUV source is uniquely suited for metrology and research applications, such as EUV Metrology, EUV Resist Development, EUV Inspection, and EUV Microscopy.
The EQ-10 is capable of delivering up to 10 Watts of in-band EUV into 2π steradians and will run continuously at pulse repetition rates of up to 2 kHz.
Energetiq’s unique technology is based on a Z-pinch plasma, but it avoids electrodes entirely by inductively coupling the current into the plasma. The plasma in the Energetiq source is magnetically confined away from the source walls, minimizing the heat load and reducing debris.
The EQ-10 has low cost of ownership due to low Xenon flow rate, minimized consumable cost, and small footprint. It also has proven reliability with patented Electrodeless Z-Pinch™ technology and CE Mark and SEMI S2-0703 compliant.