The EQ-10 is an innovative compact EUV light source designed for reliability and cost-effectiveness. Developed by Energetiq, it harnesses the power of the patented Electrodeless Z-Pinch™ technology, which utilizes Xenon gas. This state-of-the-art light source has become an essential tool in the EUV community, renowned for its dependable performance, user-friendly operation, and low operating costs. The EQ-10 is particularly well-suited for metrology and research, making it a versatile choice for various scientific and industrial applications.

One of the standout attributes of the EQ-10 is its modular design, which allows for seamless integration into existing process tools. The system comprises several critical components, including the electrodeless Z-pinch source assembly, vacuum and gas subsystems, power delivery subsystem, and control electronics. This sophisticated setup enables the EQ-10 to deliver up to 10 Watts of in-band EUV radiation into 2π steradians, with the capability to operate continuously at pulse repetition rates of up to 2 kHz. Such performance ensures that users can rely on consistent and powerful EUV output for their specific needs.

Energetiq's Electrodeless Z-Pinch™ technology is a groundbreaking approach that distinguishes the EQ-10 from other EUV sources. By inductively coupling the current into the plasma, the technology eliminates the need for electrodes, which are prone to melting and debris production. This method not only enhances the spatial stability of the plasma but also ensures stable, repeatable power output while minimizing heat load and debris. This innovative design makes the EQ-10 a reliable and efficient choice for those seeking high-quality EUV light sources.