With over 60 units of its predecessor, the EQ-10, installed globally, the EQS-10 builds on a field-proven platform to deliver up to four times the energy per pulse and an impressive operating frequency of up to 5 kHz. Designed with cutting-edge solid-state switching technology, the EQS-10 ensures unmatched efficiency, making it the go-to solution for demanding EUV applications, including EUV metrology, resist development, and defect inspection.

Energetiq’s patented Electrodeless Z-Pinch™ technology, now in its next-generation form, continues to set the standard for EUV and soft X-ray light sources. The EQS-10 maintains the low debris, long bore lifetime, and high spatial stability that customers expect, ensuring minimal downtime and maximizing operational efficiency. Supported by Energetiq's global network, the EQS-10 is more than just a product—it's a reliable solution that adapts to the needs of the industry.