193 nm Excimer Laser Mirrors For 45° Incidence MR1040
Description
These high performance mirrors are intended for general purpose beam steering tasks in ArF excimer laser based applications and systems.
193 nm Excimer Laser Mirrors For 45° Incidence MR1040
Specifications |
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Substrate Material: | Fused Silica |
Wavelength Range: | 187-197nm |
Angle Of Incidence (AOI): | 45 deg |
Flatness (Coated Surface): | lambda/10 |
Surface Quality: | 10-5 scratch-dig |
Reflectivity (Rs, Rp): | 95 % |
Diameter: | 25.4 mm |
Thickness: | 9.525 mm |
Features
High reflectivity
Superior laser damage resistance
Excellent mechanical durability
For pricing, technical or any other questions please contact the supplier
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Frequently Asked Questions
These mirrors are intended for general purpose beam steering tasks in ArF excimer laser based applications and systems.
The mirrors have high reflectivity, superior laser damage resistance, and excellent mechanical durability.
The chamfer size is 0.50 mm at 45°.
The coating on Surface 1 has a reflectivity of ≥95.0% at 193 nm.
The price for the MR1040 mirror is $340.00.