193 nm Excimer Laser Mirrors For 0° Incidence MR1060
Description
These high performance mirrors are intended for general purpose beam steering tasks in ArF excimer laser based applications and systems.
193 nm Excimer Laser Mirrors For 0° Incidence MR1060
Specifications |
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|---|---|
| Substrate Material: | Fused Silica |
| Wavelength Range: | 187-200nm |
| Angle Of Incidence (AOI): | 0 deg |
| Flatness (Coated Surface): | lambda/10 |
| Surface Quality: | 10-5 scratch-dig |
| Reflectivity (Rs, Rp): | 97 % |
| Diameter: | 50.8 mm |
| Thickness: | 9.525 mm |
Features
High reflectivity
Superior laser damage resistance
Excellent mechanical durability
For pricing, technical or any other questions please contact the supplier
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External Vendor
Alpine Research Optics (ARO)
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Frequently Asked Questions
These mirrors are intended for general purpose beam steering tasks in ArF excimer laser based applications and systems.
The mirrors have high reflectivity, superior laser damage resistance, and excellent mechanical durability.
The chamfer size is 0.50 mm at 45°.
The diameter tolerance is +0.00, -0.13 mm.
The reflectivity of Surface 1 coating is ≥97.0% at 193 nm.