EQ-10HR High Repetition Rate EUV Light Source
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United States
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On FindLight:
since 2017
Description
The EQ-10HR is a state-of-the-art EUV light source designed to meet the rigorous demands of modern metrology and research applications. Utilizing Energetiq’s innovative Electrodeless Z-Pinch™ technology, this compact and efficient system leverages Xenon gas to deliver a high repetition rate of 10 kHz. This makes the EQ-10HR an ideal solution for environments where simulating high volume manufacturing is crucial.
As a stand-alone system, the EQ-10HR is engineered for seamless integration into process tools. It encompasses a comprehensive suite of components, including the electrodeless Z-pinch source assembly, a maglev vacuum pumping subsystem, a gas delivery subsystem, a power delivery subsystem, and advanced control electronics. This integrated approach ensures that the EQ-10HR not only meets performance expectations but also maintains ease of use and reliability.
Energetiq Technology, Inc. has a long-standing reputation for developing advanced light sources that support the analysis and manufacture of nano-scale structures. The EQ-10HR embodies this legacy by combining cutting-edge plasma physics with robust industrial design, ensuring that it delivers high-brightness EUV light consistently and reliably. This commitment to quality and innovation positions the EQ-10HR as a cost-effective and dependable choice for researchers and manufacturers alike.
EQ-10HR High Repetition Rate EUV Light Source
Specifications |
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|---|---|
| Central Wavelength: | 13.5 nm |
| Spectral Bandwidth: | 0.27 nm |
| EUV Output Power (2pi Steradian): | 20 W |
| Pulse Repetition Rate: | 1000 – 10000 Hz |
Features
- High Repetition Rate EUV Light Source: The EQ-10HR features Energetiq's Electrodeless Z-Pinch™ technology, providing a 10 kHz pulse rate for efficient EUV emission.
- Compact and Reliable Design: Built as a stand-alone system, the EQ-10HR is easy to integrate into existing process tools, featuring a small footprint and low maintenance requirements.
- Low Cost of Ownership: The system is designed with a low Xenon flow rate and minimized consumable costs, making it a cost-effective solution for high volume manufacturing (HVM) simulations.
- Proven Reliability: Utilizing patented Electrodeless Z-Pinch™ technology, the EQ-10HR is CE Mark and SEMI S2-0703 compliant, ensuring high standards of safety and reliability.
- Versatile Applications: Ideal for accelerated EUV optics testing, EUV metrology, EUV resist development, defect inspection, and EUV microscopy.
- Advanced EUV Performance: Operates at a typical source pressure of 150 mTorr with a Xenon flow rate of 100 sccm, ensuring optimal performance.
Applications
- High Repetition Rate: Delivers a stable 10 kHz pulse rate for efficient EUV generation.
- Electrodeless Z-Pinch™ Technology: Patented design avoids electrodes, reducing debris and heat load.
- Compact and Cost-Effective: Small footprint with minimized consumable costs for operational efficiency.
- Reliable Performance: Proven stability with excellent spatial and power output consistency.
- Integrated Subsystems: Includes source assembly, maglev vacuum pump, gas delivery, power delivery, and control electronics.
- Regulatory Compliance: CE Mark and SEMI S2-0703 certified for global standards adherence.
Frequently Asked Questions
The EQ-10HR is a compact, easy-to-use, reliable, and cost-effective EUV light source based on Energetiq’s proven Electrodeless Z-Pinch™ technology using Xenon gas.
The EQ-10HR EUV source has a pulse repetition rate of 10 kHz.
The EQ-10HR EUV source is uniquely suited for metrology and research applications where simulation of high volume manufacturing (HVM) is required. It can be used for accelerated EUV optics testing, EUV metrology, EUV resist development, defect inspection, and EUV microscopy.
The EQ-10HR system has a source rack dimension of 2002 x 611 x 915 mm (78.8 x 24.1 x 36.0 in) and a weight of 440 kg (968 lbs). The instrument rack dimension is 1356 x 611 x 915 mm (53.4 x 24.1 x 36.0 in) and a weight of 215.5 kg (475 lbs). The modulator dimension is 498 x 356 x 701 mm (19.6 x 14.0 x 27.6 in) and a weight of 54.4 kg (120 lbs). The source dimension is 810 x 697 x 769 mm (31.9 x 27.5 x 30.3 in) and a weight of 98.4 kg (217 lbs). The fore pump assembly dimension is 643 x 259 x 460 mm (30.1 x 21.9 x 21.0 in) and a weight of 27.7 kg (61 lbs).
The EQ-10HR system requires electrical power of 208V, 3Ø, 50/60 Hz, 30A, cooling water of 40-60 PSID (0.28–0.41 MPa), 1.5 GPM (5.7 lpm) min., 30°C max. inlet, clean dry air of 80–100 PSIG (0.55–0.69 MPa), and Xenon of 15–40 PSIG (0.10–0.28 MPa), 100 sccm max. (40 sccm typ.). It is compliant with the EQ-10 Series CE Mark and SEMI S2-0703.