Nano-Man5 (X, Y, Z, θX , θY) Piezo Nanopositioner
Description
The Nano-Man5 is a five axis (X, Y, Z, θX , θY) piezo nanopositioning system with closed loop feedback control for absolutel position measurement. The compact design of the Nano-Man5 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM.
The Nano-Man5 is ideal for alignment applications which require three linear axes of motion combined with “tip” and “tilt” (θXθY). Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control.
The Nano-Man5 is also available in high vacuum (non-bakeable) compatible models. Similar to the Nano-Man5, the Nano-M350 shares the same physical dimensions but has only three axes (XYZ) of motion.
Nano-Man5 (X, Y, Z, θX , θY) Piezo Nanopositioner
Features
- Compact Piezo Nanopositioner
- Five axis motion (XYZ θX θY)
- 50 μm x 50 μm x 25 μm x 1mrad x 1mrad ranges of motion
- Closed loop control
Applications
- Alignment
- MEMS
- Nanolithography
- SEM
For pricing, technical or any other questions please contact the supplier
- No registration required
- No markups, no fees
- Direct contact with supplier
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United States
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Frequently Asked Questions
The Nano-Man5 is ideal for alignment applications which require three linear axes of motion combined with “tip” and “tilt” (θXθY), as well as nanolithography and SEM.
The Nano-Man5 has ranges of motion of 50 µm x 50 µm x 25 µm x 1mrad x 1mrad.
The Nano-Man5 is a five axis piezo nanopositioning system with closed loop feedback control for absolute position measurement.
The recommended maximum load for the Nano-Man5 is 0.2 kg for both horizontal and vertical directions.
The resolution of the Nano-Man5 is 0.1 nm for X and Y axes, 0.05 nm for Z axis, and 2 nradian for θX and θY axes.