Nano-M3Z (Z, θX , θY) Piezo Nanopositioner
Description
The Nano-M3Z is a compact, three axis (Z, θX , θY) piezo nanopositioning system constructed from Aluminum. The compact design of the Nano-M3Z allows it to be integrated into existing instrumentation where space is restricted.
The Nano-M3Z is ideal for demanding applications which require precise alignment capabilities. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control.
A related model, the Nano-Man5, incorporates linear X and Y motion to the capabilities of the Nano-M3Z.
Nano-M3Z (Z, θX , θY) Piezo Nanopositioner
Features
- Compact piezo nanopositioner
- Three axis motion (Z θX θY)
- Low profile: 0.76"
- Closed loop control
Applications
- Z-axis plus tip/tilt alignment
- Nanolithography
- Metrology
- Nano-alignment
For pricing, technical or any other questions please contact the supplier
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- No markups, no fees
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United States
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Frequently Asked Questions
The features of the Nano-M3Z piezo nanopositioner include compact design, three axis motion (Z θX θY), low profile of 0.76", sensor technology, and closed loop control.
The typical applications of the Nano-M3Z piezo nanopositioner include Z-axis plus tip/tilt alignment, nanolithography, metrology, and nano-alignment.
The Nano-M3Z is a compact, three axis (Z, θX , θY) piezo nanopositioning system constructed from Aluminum.
The recommended maximum load for the Nano-M3Z piezo nanopositioner is 0.5 kg for horizontal and 0.2 kg for vertical.
The resolution of the Nano-M3Z piezo nanopositioner is 0.05 nm for Z-axis, 2 nradian for θX, and 2 nradian for θY.