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- Luxtron m920 Series
Luxtron m920 Series
OVERVIEW
The complete Luxtron® m920 series OEM solution is built using the electronics module assembly with two boards plus probes. The main board contains fiber optic temperature sensing channels, digital output (RS232 ASCII and RS485 Modbus), and power connection. The analog output board provides 0 to 10 V or 4 to 20 mA output and is mounted above the main board. An optional metal enclosure is also available. The m920 series system uses Fluoroptic® technology. The m920 series main board conditions the measurement signal from Fluoroptic probes and reports a calibrated temperature to the OEM control system.
Applications
High accuracy and temperature range for different Etching and Wafer Fab processes
Fast sample rate enables monitoring of faster ramp conditions
Low noise solution for better temperature measurements
High reliability for low failure rates
KEY FEATURES
Two or four channels, expandable up to 64 with RS485 Modbus
Single PCB design with options for analog output and metal enclosure
Probes are immune to electomagnetic interference, such as high voltage, RF, plasma, and microwave
Backward compatible with Advanced Energy spring loaded and Accudisc probes
Custom probes available for semiconductor applications
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