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Page 9 - Gas Lasers

IR-10 CO2 Waveguide Laser
Infrared Instruments Inc.
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IR-10 CO2 Waveguide Laser
BENEFITS> Excellent amplitude stability> Compact, efficient design> Power output to 20 watts> Portable, light-weight system> No optical alignment required

Specifications
Gas Medium: CO2
Wavelength: 10 um
Output Power: 10.0 W
Mode Quality (M^2): Not Specified
Beam Diameter: 1.75 mm
...
Data Sheet
IR-7 CO2 Waveguide Laser
Infrared Instruments Inc.
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IR-7 CO2 Waveguide Laser
BENEFITS> Excellent amplitude stability> Compact, efficient design> Power output to 20 watts> Portable, light-weight system> No optical alignment required

Specifications
Gas Medium: CO2
Wavelength: 10 um
Output Power: 7.0 W
Mode Quality (M^2): Not Specified
Beam Diameter: 1.5 mm
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Data Sheet
IR-3 CO2 Waveguide Laser
Infrared Instruments Inc.
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IR-3 CO2 Waveguide Laser
BENEFITS> Excellent amplitude stability> Compact, efficient design> Power output to 20 watts> Portable, light-weight system> No optical alignment required

Specifications
Gas Medium: CO2
Wavelength: 10 um
Output Power: 3.0 W
Mode Quality (M^2): Not Specified
Beam Diameter: 1.5 mm
...
Data Sheet
IRCO-3 CO Waveguide Laser
Infrared Instruments Inc.
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IRCO-3 CO Waveguide Laser
BENEFITS > Excellent amplitude stability> Compact, efficient design> Power output to 20 watts> Portable, light-weight system> No optical alignment required

Specifications
Gas Medium: CO
Wavelength: 5.6 um
Output Power: 3 W
Mode Quality (M^2): Not Specified
Beam Diameter: 1.9 mm
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Data Sheet
193nm High Repetition Type GIGANEX 600W Type Laser
Gigaphoton Inc.
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193nm High Repetition Type GIGANEX 600W Type Laser
We are convinced that GIGANEX, newly created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers, can also generate new innovations in fields other than ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 100 mJ
Average Power: 600 W
Max Repetition Rate: 6000 Hz
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Data Sheet
351nm High Output-Low Repetition Type GIGANEX 600W Type Laser
Gigaphoton Inc.
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351nm High Output-Low Repetition Type GIGANEX 600W Type Laser
We are convinced that GIGANEX, newly created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers, can also generate new innovations in fields other than ...

Specifications
Gas Mixture: XeF
Wavelength: 351 nm
Pulse Energy: 1000 mJ
Average Power: 600 W
Max Repetition Rate: 600 Hz
...
Data Sheet
308nm High Output-Low Repetition Type GIGANEX 600W Type Laser
Gigaphoton Inc.
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308nm High Output-Low Repetition Type GIGANEX 600W Type Laser
We are convinced that GIGANEX, newly created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers, can also generate new innovations in fields other than ...

Specifications
Gas Mixture: XeCl
Wavelength: 308 nm
Pulse Energy: 1000 mJ
Average Power: 600 W
Max Repetition Rate: 600 Hz
...
Data Sheet
248nm High Output-Low Repetition Type GIGANEX 600W Type Laser
Gigaphoton Inc.
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248nm High Output-Low Repetition Type GIGANEX 600W Type Laser
We are convinced that GIGANEX, newly created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers, can also generate new innovations in fields other than ...

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 1000 mJ
Average Power: 600 W
Max Repetition Rate: 600 Hz
...
Data Sheet
193nm High Output-Low Repetition Type GIGANEX 600W Type Laser
Gigaphoton Inc.
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193nm High Output-Low Repetition Type GIGANEX 600W Type Laser
We are convinced that GIGANEX, newly created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers, can also generate new innovations in fields other than ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 1000 mJ
Average Power: 600 W
Max Repetition Rate: 600 Hz
...
Data Sheet
GT65A ArF Excimer Laser
Gigaphoton Inc.
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GT65A ArF Excimer Laser
GT65A, the seventh generation of platforms using the injection lock method, is installed with leading-edge technology and achieves further improved productivity (wafer output) for the customer through “exposure performance improvements” due to changeable spectral width (E95) and improved stability, “high availability” due to extended ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 20 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
GT64A ArF Immersion Excimer Laser
Gigaphoton Inc.
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GT64A ArF Immersion Excimer Laser
The GT64A offers the industry\'s highest output power of 120W with  high beam performance and stability.  With design emphasis on performance, efficiency, and reduction of environmental impact, the product challenges the limits of total operational cost efficiency.   This is the 6th generation of products to inherit ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 20 mJ
Average Power: 120 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
GT63A ArF Excimer Laser 90W version
Gigaphoton Inc.
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GT63A ArF Excimer Laser 90W version
The GT63A, the latest model of the GT series, is a fifth-generation model featuring the same injection-locking platform. The GT63A is mounted with the four “s” series functions designed in response to customers’ needs to create additional value: sMPL (Spectrum Multi-Positioning LNM)*1, the first customer-approved spectrum ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 15 mJ
Average Power: 90 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
GT63A ArF Excimer Laser 60W version
Gigaphoton Inc.
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GT63A ArF Excimer Laser 60W version
The GT63A, the latest model of the GT series, is a fifth-generation model featuring the same injection-locking platform. The GT63A is mounted with the four “s” series functions designed in response to customers’ needs to create additional value: sMPL (Spectrum Multi-Positioning LNM)*1, the first customer-approved spectrum control ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
GT62A 6-kHz Excimer Laser 60W version
Gigaphoton Inc.
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GT62A 6-kHz Excimer Laser 60W version
The GT62A, the latest model of the GT series, is the fourth-generation model featuring the same injection-locking platform; it delivers the world’s highest output, 90 watts, to support double-patterning immersion lithography*. In order to meet a variety of customer needs, a 60-W version of the GT62A also is available to ensure ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
GT62A 6-kHz Excimer Laser 90W version
Gigaphoton Inc.
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GT62A 6-kHz Excimer Laser 90W version
The GT62A, the latest model of the GT series, is the fourth-generation model featuring the same injection-locking platform; it delivers the world’s highest output, 90 watts, to support double-patterning immersion lithography*. In order to meet a variety of customer needs, a 60-W version of the GT62A also is available to ensure ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 15 mJ
Average Power: 90 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
GT61A 6 kHz Excimer Laser
Gigaphoton Inc.
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GT61A 6 kHz Excimer Laser
Less than a year after we began mass-production and shipment of the GT60A, Gigaphoton has successfully developed the GT61A. Model GT61A offers a 30% improvement of spectral bandwidth (E95%) from that of the GT60A as well as a longer laser chamber life to reduce both downtime and maintenance cost. The GT61A, the third-generation model ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
GT60A 6 kHz Excimer Laser
Gigaphoton Inc.
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GT60A 6 kHz Excimer Laser
Marking less than one year since the company began mass-production and shipment of the GT40A, Gigaphoton has now successfully developed the GT60A, delivering an improved repetition rate 1.5-times that of the GT40A. The GT60A is the latest-generation model, featuring the same injection-locking platform as that used by the GT40A, which ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
GT40A 4-kHz ArF Excimer Laser
Gigaphoton Inc.
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GT40A 4-kHz ArF Excimer Laser
Model GT40A uses an injection-locking resonator (first in the world) as a lithography tool light source to allow simultaneous maintenance of narrower spectral bandwidth and higher output, a combination that is difficult to achieve with conventional technologies. In addition, it provides lower peak-pulse energy that reduces damage to ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 11.25 mJ
Average Power: 45 W
Max Repetition Rate: 4000 Hz
...
Data Sheet
G42A 4-kHz ArF Excimer Laser
Gigaphoton Inc.
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G42A 4-kHz ArF Excimer Laser
4-kHz ArF Excimer Laser for 80-nm Technology Node

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 5 mJ
Average Power: 20 W
Max Repetition Rate: 4000 Hz
...
Data Sheet
G41A 4-kHz ArF Excimer Laser
Gigaphoton Inc.
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G41A 4-kHz ArF Excimer Laser
4-kHz ArF Excimer Laser for Design Rules of up to 0.10 µm

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 5 mJ
Average Power: 20 W
Max Repetition Rate: 4000 Hz
...
Data Sheet
G41K-1H KrF 4 kHz Excimer Laser
Gigaphoton Inc.
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G41K-1H KrF 4 kHz Excimer Laser
As the upgrade version of the second-generation model of 4-kHz excimer laser G41K, G41K-1H is mounted with a magnetic-levitation laser chamber and highly efficient line-narrowing and monitor modules on the G41K platform as standard features to achieve a high output of 40 W, one class higher than any other product. The G41K-1H has ...

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 10 mJ
Average Power: 40 W
Max Repetition Rate: 4000 Hz
...
Data Sheet
G21K 2 kHz KrF Excimer Laser
Gigaphoton Inc.
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G21K 2 kHz KrF Excimer Laser
2 kHz KrF Excimer Laser for 0.13 µm Design Rule

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 10 mJ
Average Power: 20 W
Max Repetition Rate: 2000 Hz
...
Data Sheet
G20K 2 kHz KrF Excimer Laser
Gigaphoton Inc.
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G20K 2 kHz KrF Excimer Laser
The G20K features high energy stability (±0.4%) and a narrow spectral bandwidth (FWHM) of 0.6 pm or less to allow exposure of 0.18-µm geometries at high resolution.

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 10 mJ
Average Power: 20 W
Max Repetition Rate: 2000 Hz
...
Data Sheet
G10K 1-kHz KrF Excimer Laser
Gigaphoton Inc.
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G10K 1-kHz KrF Excimer Laser
Stability and durability are the biggest technological challenges for an excimer laser, because it uses fluorine, high-voltage discharge, and deep UV, all of which are highly reactive. As well as stability and durability, an excimer laser light source for lithography tools requires high monochromaticity for the laser beam and high ...

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 10 mJ
Average Power: 10 W
Max Repetition Rate: 1000 Hz
...
Data Sheet
EX100 High Power ArF Excimer Laser
GAM Laser Inc.
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EX100 High Power ArF Excimer Laser
EX100 High Power ArF Excimer Laser

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 75 mJ
Average Power: 16 W
Max Repetition Rate: 500 Hz
...
Data Sheet