G41A 4-kHz ArF Excimer Laser
Description
4-kHz ArF Excimer Laser for Design Rules of up to 0.10 µm
G41A 4-kHz ArF Excimer Laser
Specifications |
|
|---|---|
| Gas Mixture: | ArF |
| Wavelength: | 193 nm |
| Pulse Energy: | 5 mJ |
| Average Power: | 20 W |
| Max Repetition Rate: | 4000 Hz |
| Pulse Duration: | N/A ns |
Features
- Mounted with a newly designed solid-state pulse power supply that allows a repetition rate of 4000 Hz so as to achieve high throughput
- High-reliability design inherited from our field-proven KrF excimer laser G10K/20K series
For pricing, technical or any other questions please contact the supplier
- No registration required
- No markups, no fees
- Direct contact with supplier
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How to order?
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Ships from:
Japan
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Sold by:
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On FindLight:
External Vendor
Gigaphoton Inc.
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Frequently Asked Questions
Yes, the G41A 4-kHz ArF Excimer Laser has a high-reliability design inherited from the field-proven KrF excimer laser G10K/20K series.
The G41A 4-kHz ArF Excimer Laser can handle design rules of up to 0.10 µm.
The repetition rate of the G41A 4-kHz ArF Excimer Laser is 4000 Hz.
The wavelength of the G41A 4-kHz ArF Excimer Laser is not provided in the product description.
The G41A 4-kHz ArF Excimer Laser is mounted with a newly designed solid-state pulse power supply.