CLS 5000 Excimer Laser
Specifications |
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|---|---|
| Gas Mixture: | ArF, XeCl, KrF |
| Wavelength: | 193 nm, 308 nm, 248 nm |
| Pulse Energy: | 12-25 mJ |
| Average Power: | 6-12.5 W |
| Max Repetition Rate: | 500 Hz |
| Pulse Duration: | 10-12 ns |
Features
High bean pointing stability
High bean position stability
High repetition rate
HV solid state switch
Compact design
Built-in energy oil-free vacuum pump with halogen filter
Built-in energy detector
Power stabilization
Computer control
For pricing, technical or any other questions please contact the supplier
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How to order?
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Ships from:
Russia
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Sold by:
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On FindLight:
External Vendor
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Frequently Asked Questions
The CLS 5000 Excimer Laser features high beam pointing stability, high beam position stability, high repetition rate, HV solid state switch, compact design, built-in energy oil-free vacuum pump with halogen filter, built-in energy detector, power stabilization, and computer control.
The CLS 5000 Excimer Laser is used for various applications such as micromachining, surface treatment, and medical procedures.
The CLS 5000 Excimer Laser uses a cooling water system.
The maximum pulse energy of the CLS 5000 Excimer Laser varies depending on the wavelength used. For ArF, it is 15 mJ, for KrF, it is 25 mJ, and for XeCl, it is 12 mJ.
The weight of the CLS 5000 Excimer Laser is 85 kg and its dimension is 890 x 340 x 460 mm.