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IPEX-746 XeCl Excimer Laser
LightMachinery Inc
The largest single cost of operating an excimer laser is laser gas consumption (also known as dynamic gas lifetime*).  With our patented exciPure™  technology,  LightMachinery has achieved a 10X improvement in gas usage over competing lasers.   This technological breakthrough leads to ...
  • Gas Mixture: XeCl
  • Wavelength: 308 nm
  • Pulse Energy: 250 mJ
  • Average Power: 25 W
  • Max Repetition Rate: 100 Hz
  • ...
Data Sheet
IPEX-766 XeF Excimer Laser
LightMachinery Inc
The largest single cost of operating an excimer laser is laser gas consumption (also known as dynamic gas lifetime*).  With our patented exciPure™  technology,  LightMachinery has achieved a 10X improvement in gas usage over competing lasers.   This technological breakthrough leads to ...
  • Gas Mixture: XeF
  • Wavelength: 351 nm
  • Pulse Energy: 300 mJ
  • Average Power: 15 W
  • Max Repetition Rate: 50 Hz
  • ...
Data Sheet
IPEX-746 XeF Excimer Laser
LightMachinery Inc
The largest single cost of operating an excimer laser is laser gas consumption (also known as dynamic gas lifetime*).  With our patented exciPure™  technology,  LightMachinery has achieved a 10X improvement in gas usage over competing lasers.   This technological breakthrough leads to ...
  • Gas Mixture: XeF
  • Wavelength: 351 nm
  • Pulse Energy: 225 mJ
  • Average Power: 100 W
  • Max Repetition Rate: 22 Hz
  • ...
Data Sheet
IPEX-746 KrF Excimer Laser
LightMachinery Inc
The largest single cost of operating an excimer laser is laser gas consumption (also known as dynamic gas lifetime*).  With our patented exciPure™  technology,  LightMachinery has achieved a 10X improvement in gas usage over competing lasers.   This technological breakthrough leads to ...
  • Gas Mixture: KrF
  • Wavelength: 248 nm
  • Pulse Energy: 400 mJ
  • Average Power: 40 W
  • Max Repetition Rate: 100 Hz
  • ...
Data Sheet
IPEX-746 ArF Excimer Laser
LightMachinery Inc
The largest single cost of operating an excimer laser is laser gas consumption (also known as dynamic gas lifetime*).  With our patented exciPure™  technology,  LightMachinery has achieved a 10X improvement in gas usage over competing lasers.   This technological breakthrough leads to ...
  • Gas Mixture: ArF
  • Wavelength: 193 nm
  • Pulse Energy: 150 mJ
  • Average Power: 15 W
  • Max Repetition Rate: 100 Hz
  • ...
Data Sheet
IPEX-868 KrF Industrial Excimer Laser
LightMachinery Inc
Designed for high duty cycle operation in a manufacturing environment, IPEX Series lasers deliver high power ultraviolet laser machining combined with state-of-the-art performance.  Incorporating LightMachinery’s patented exciPure™  technology, IPEX lasers offer MASSIVE gas lifetimes, superior optical ...
  • Gas Mixture: KrF
  • Wavelength: 248 nm
  • Pulse Energy: 600 mJ
  • Average Power: 60 W
  • Max Repetition Rate: 100 Hz
  • ...
Data Sheet
IPEX-840 XeF Industrial Excimer Laser
LightMachinery Inc
Designed for high duty cycle operation in a manufacturing environment, IPEX Series lasers deliver high power ultraviolet laser machining combined with state-of-the-art performance.  Incorporating LightMachinery’s patented exciPure™  technology, IPEX lasers offer MASSIVE gas lifetimes, superior optical ...
  • Gas Mixture: XeF
  • Wavelength: 351 nm
  • Pulse Energy: 275 mJ
  • Average Power: 45 W
  • Max Repetition Rate: 200 Hz
  • ...
Data Sheet
IPEX-840 XeCl Industrial Excimer Laser
LightMachinery Inc
Designed for high duty cycle operation in a manufacturing environment, IPEX Series lasers deliver high power ultraviolet laser machining combined with state-of-the-art performance.  Incorporating LightMachinery’s patented exciPure™  technology, IPEX lasers offer MASSIVE gas lifetimes, superior optical ...
  • Gas Mixture: XeCl
  • Wavelength: 308 nm
  • Pulse Energy: 300 mJ
  • Average Power: 50 W
  • Max Repetition Rate: 200 Hz
  • ...
Data Sheet
IPEX-840 KrF Industrial Excimer Laser
LightMachinery Inc
Designed for high duty cycle operation in a manufacturing environment, IPEX Series lasers deliver high power ultraviolet laser machining combined with state-of-the-art performance.  Incorporating LightMachinery’s patented exciPure™  technology, IPEX lasers offer MASSIVE gas lifetimes, superior optical ...
  • Gas Mixture: KrF
  • Wavelength: 248 nm
  • Pulse Energy: 450 mJ
  • Average Power: 80 W
  • Max Repetition Rate: 200 Hz
  • ...
Data Sheet
IPEX-840 ArF Industrial Excimer Laser
LightMachinery Inc
Designed for high duty cycle operation in a manufacturing environment, IPEX Series lasers deliver high power ultraviolet laser machining combined with state-of-the-art performance.  Incorporating LightMachinery’s patented exciPure™  technology, IPEX lasers offer MASSIVE gas lifetimes, superior optical ...
  • Gas Mixture: ArF
  • Wavelength: 193 nm
  • Pulse Energy: 230 mJ
  • Average Power: 30 W
  • Max Repetition Rate: 200 Hz
  • ...
Data Sheet
ATLEX 500 FBG ArF Excimer Laser
ATL Lasertechnik GmbH
Ultra-compact, high efficient excimer laser for Fiber Bragg Grating (FBG) writing 
  • Gas Mixture: ArF
  • Wavelength: 193 nm
  • Pulse Energy: 10 mJ
  • Average Power: 4.0 W
  • Max Repetition Rate: 500 Hz
  • ...
Data Sheet
ATLEX 1000 I KrF Excimer Laser
ATL Lasertechnik GmbH
A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications 
  • Gas Mixture: KrF
  • Wavelength: 248 nm
  • Pulse Energy: 15 mJ
  • Average Power: 10 W
  • Max Repetition Rate: 1000 Hz
  • ...
Data Sheet
ATLEX 1000 I ArF Excimer Laser
ATL Lasertechnik GmbH
A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications 
  • Gas Mixture: ArF
  • Wavelength: 193 nm
  • Pulse Energy: 10 mJ
  • Average Power: 8 W
  • Max Repetition Rate: 1000 Hz
  • ...
Data Sheet
ATLEX 500 I XeF Excimer Laser
ATL Lasertechnik GmbH
A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications 
  • Gas Mixture: XeF
  • Wavelength: 351 nm
  • Pulse Energy: 7 mJ
  • Average Power: 2.5 W
  • Max Repetition Rate: 500 Hz
  • ...
Data Sheet
ATLEX 500 I XeCl Excimer Laser
ATL Lasertechnik GmbH
A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications 
  • Gas Mixture: XeCl
  • Wavelength: 308 nm
  • Pulse Energy: 8 mJ
  • Average Power: 3.0 W
  • Max Repetition Rate: 500 Hz
  • ...
Data Sheet
ATLEX 500 I KrF Excimer Laser
ATL Lasertechnik GmbH
A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications 
  • Gas Mixture: KrF
  • Wavelength: 248 nm
  • Pulse Energy: 15 mJ
  • Average Power: 6.5 W
  • Max Repetition Rate: 500 Hz
  • ...
Data Sheet
ATLEX 500 I ArF Excimer Laser
ATL Lasertechnik GmbH
A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications 
  • Gas Mixture: ArF
  • Wavelength: 193 nm
  • Pulse Energy: 10 mJ
  • Average Power: 4.0 W
  • Max Repetition Rate: 500 Hz
  • ...
Data Sheet
ATLEX 500 I F2 Excimer Laser
ATL Lasertechnik GmbH
A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications 
  • Gas Mixture: F2*
  • Wavelength: 157 nm
  • Pulse Energy: 1 mJ
  • Average Power: 0.5 W
  • Max Repetition Rate: 500 Hz
  • ...
Data Sheet
ATLEX 300 I XeF Excimer Laser
ATL Lasertechnik GmbH
A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications 
  • Gas Mixture: XeF
  • Wavelength: 351 nm
  • Pulse Energy: 7 mJ
  • Average Power: 1.7 W
  • Max Repetition Rate: 300 Hz
  • ...
Data Sheet
ATLEX 300 I XeCl Excimer Laser
ATL Lasertechnik GmbH
A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications 
  • Gas Mixture: XeCl
  • Wavelength: 308 nm
  • Pulse Energy: 8 mJ
  • Average Power: 2.0 W
  • Max Repetition Rate: 300 Hz
  • ...
Data Sheet

Did You know?

The excimer laser was invented in 1970 by Nikolai Basov, V. A. Danilychev and Yu. M. Popov, at the Lebedev Physical Institute in Moscow, using a xenon dimer (Xe2) excited by an electron beam to give stimulated emission at 172 nm wavelength. An excimer laser typically uses a combination of a noble gas and a reactive gas. Under the appropriate conditions of electrical stimulation and high pressure, a pseudo-molecule called an excimer is created, which can only exist in an energized state and can give rise to laser light in the ultraviolet range.