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Page 2 - Excimer

ATLEX 300 I ArF Excimer Laser
ATL Lasertechnik GmbH
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ATLEX 300 I ArF Excimer Laser
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A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications 

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 2.4 W
Max Repetition Rate: 300 Hz
...
Data Sheet
ATLEX 300 I F2 Excimer Laser
ATL Lasertechnik GmbH
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ATLEX 300 I F2 Excimer Laser
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A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications 

Specifications
Gas Mixture: F2*
Wavelength: 157 nm
Pulse Energy: 1 mJ
Average Power: 0.2 W
Max Repetition Rate: 300 Hz
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Data Sheet
ATLEX 300 FBG KrF Excimer Laser
ATL Lasertechnik GmbH
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ATLEX 300 FBG KrF Excimer Laser
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Ultra-compact, high efficient excimer laser for Fiber Bragg Grating (FBG) writing 

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 15 mJ
Average Power: 4 W
Max Repetition Rate: 300 Hz
...
Data Sheet
ATLEX 300 FBG ArF Excimer Laser
ATL Lasertechnik GmbH
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ATLEX 300 FBG ArF Excimer Laser
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Ultra-compact, high efficient excimer laser for Fiber Bragg Grating (FBG) writing 

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 2.4 W
Max Repetition Rate: 300 Hz
...
Data Sheet
ATLEX S KrF Excimer Laser (500Hz)
ATL Lasertechnik GmbH
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ATLEX S KrF Excimer Laser (500Hz)
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ATLEX-S-Series-Laser is a very compact UV-light source designed for low- and mid-range duty cycle S Applications

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 15 mJ
Average Power: 6 W
Max Repetition Rate: 500 Hz
...
Data Sheet
ATLEX S KrF Excimer Laser (300Hz)
ATL Lasertechnik GmbH
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ATLEX S KrF Excimer Laser (300Hz)
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ATLEX-S-Series-Laser is a very compact UV-light source designed for low- and mid-range duty cycle S Applications

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 15 mJ
Average Power: 4 W
Max Repetition Rate: 300 Hz
...
Data Sheet
ATLEX S ArF Excimer Laser (500Hz)
ATL Lasertechnik GmbH
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ATLEX S ArF Excimer Laser (500Hz)
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ATLEX-S-Series-Laser is a very compact UV-light source designed for low- and mid-range duty cycle S Applications

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 4 W
Max Repetition Rate: 500 Hz
...
Data Sheet
ATLEX S ArF Excimer Laser (300Hz)
ATL Lasertechnik GmbH
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ATLEX S ArF Excimer Laser (300Hz)
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ATLEX-S-Series-Laser is a very compact UV-light source designed for low- and mid-range duty cycle S Applications

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 2.4 W
Max Repetition Rate: 300 Hz
...
Data Sheet
ATLEX LR compact air-cooled, excimer laser
ATL Lasertechnik GmbH
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ATLEX LR compact air-cooled, excimer laser
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A new generation of compact air-cooled, excimer lasers, designed for low duty cycle applications 

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: N/A W
Max Repetition Rate: N/A Hz
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Data Sheet
193nm High Repetition Type GIGANEX 600W Type Laser
Gigaphoton Inc.
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193nm High Repetition Type GIGANEX 600W Type Laser
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We are convinced that GIGANEX, newly created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers, can also generate new innovations in fields other than ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 100 mJ
Average Power: 600 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
351nm High Output-Low Repetition Type GIGANEX 600W Type Laser
Gigaphoton Inc.
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351nm High Output-Low Repetition Type GIGANEX 600W Type Laser
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We are convinced that GIGANEX, newly created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers, can also generate new innovations in fields other than ...

Specifications
Gas Mixture: XeF
Wavelength: 351 nm
Pulse Energy: 1000 mJ
Average Power: 600 W
Max Repetition Rate: 600 Hz
...
Data Sheet
308nm High Output-Low Repetition Type GIGANEX 600W Type Laser
Gigaphoton Inc.
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308nm High Output-Low Repetition Type GIGANEX 600W Type Laser
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We are convinced that GIGANEX, newly created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers, can also generate new innovations in fields other than ...

Specifications
Gas Mixture: XeCl
Wavelength: 308 nm
Pulse Energy: 1000 mJ
Average Power: 600 W
Max Repetition Rate: 600 Hz
...
Data Sheet
248nm High Output-Low Repetition Type GIGANEX 600W Type Laser
Gigaphoton Inc.
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248nm High Output-Low Repetition Type GIGANEX 600W Type Laser
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We are convinced that GIGANEX, newly created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers, can also generate new innovations in fields other than ...

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 1000 mJ
Average Power: 600 W
Max Repetition Rate: 600 Hz
...
Data Sheet
193nm High Output-Low Repetition Type GIGANEX 600W Type Laser
Gigaphoton Inc.
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193nm High Output-Low Repetition Type GIGANEX 600W Type Laser
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We are convinced that GIGANEX, newly created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers, can also generate new innovations in fields other than ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 1000 mJ
Average Power: 600 W
Max Repetition Rate: 600 Hz
...
Data Sheet
GT65A ArF Excimer Laser
Gigaphoton Inc.
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GT65A ArF Excimer Laser
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GT65A, the seventh generation of platforms using the injection lock method, is installed with leading-edge technology and achieves further improved productivity (wafer output) for the customer through “exposure performance improvements” due to changeable spectral width (E95) and improved stability, “high availability” due to extended ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 20 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
GT64A ArF Immersion Excimer Laser
Gigaphoton Inc.
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GT64A ArF Immersion Excimer Laser
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The GT64A offers the industry\'s highest output power of 120W with  high beam performance and stability.  With design emphasis on performance, efficiency, and reduction of environmental impact, the product challenges the limits of total operational cost efficiency.   This is the 6th generation of products to inherit ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 20 mJ
Average Power: 120 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
GT63A ArF Excimer Laser 90W version
Gigaphoton Inc.
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GT63A ArF Excimer Laser 90W version
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The GT63A, the latest model of the GT series, is a fifth-generation model featuring the same injection-locking platform. The GT63A is mounted with the four “s” series functions designed in response to customers’ needs to create additional value: sMPL (Spectrum Multi-Positioning LNM)*1, the first customer-approved spectrum ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 15 mJ
Average Power: 90 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
GT63A ArF Excimer Laser 60W version
Gigaphoton Inc.
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GT63A ArF Excimer Laser 60W version
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The GT63A, the latest model of the GT series, is a fifth-generation model featuring the same injection-locking platform. The GT63A is mounted with the four “s” series functions designed in response to customers’ needs to create additional value: sMPL (Spectrum Multi-Positioning LNM)*1, the first customer-approved spectrum control ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
GT62A 6-kHz Excimer Laser 60W version
Gigaphoton Inc.
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GT62A 6-kHz Excimer Laser 60W version
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The GT62A, the latest model of the GT series, is the fourth-generation model featuring the same injection-locking platform; it delivers the world’s highest output, 90 watts, to support double-patterning immersion lithography*. In order to meet a variety of customer needs, a 60-W version of the GT62A also is available to ensure ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
GT62A 6-kHz Excimer Laser 90W version
Gigaphoton Inc.
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GT62A 6-kHz Excimer Laser 90W version
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The GT62A, the latest model of the GT series, is the fourth-generation model featuring the same injection-locking platform; it delivers the world’s highest output, 90 watts, to support double-patterning immersion lithography*. In order to meet a variety of customer needs, a 60-W version of the GT62A also is available to ensure ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 15 mJ
Average Power: 90 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
GT61A 6 kHz Excimer Laser
Gigaphoton Inc.
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GT61A 6 kHz Excimer Laser
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Less than a year after we began mass-production and shipment of the GT60A, Gigaphoton has successfully developed the GT61A. Model GT61A offers a 30% improvement of spectral bandwidth (E95%) from that of the GT60A as well as a longer laser chamber life to reduce both downtime and maintenance cost. The GT61A, the third-generation model ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
GT60A 6 kHz Excimer Laser
Gigaphoton Inc.
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GT60A 6 kHz Excimer Laser
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Marking less than one year since the company began mass-production and shipment of the GT40A, Gigaphoton has now successfully developed the GT60A, delivering an improved repetition rate 1.5-times that of the GT40A. The GT60A is the latest-generation model, featuring the same injection-locking platform as that used by the GT40A, which ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
...
Data Sheet
GT40A 4-kHz ArF Excimer Laser
Gigaphoton Inc.
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GT40A 4-kHz ArF Excimer Laser
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Model GT40A uses an injection-locking resonator (first in the world) as a lithography tool light source to allow simultaneous maintenance of narrower spectral bandwidth and higher output, a combination that is difficult to achieve with conventional technologies. In addition, it provides lower peak-pulse energy that reduces damage to ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 11.25 mJ
Average Power: 45 W
Max Repetition Rate: 4000 Hz
...
Data Sheet
G42A 4-kHz ArF Excimer Laser
Gigaphoton Inc.
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G42A 4-kHz ArF Excimer Laser
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4-kHz ArF Excimer Laser for 80-nm Technology Node

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 5 mJ
Average Power: 20 W
Max Repetition Rate: 4000 Hz
...
Data Sheet
G41A 4-kHz ArF Excimer Laser
Gigaphoton Inc.
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G41A 4-kHz ArF Excimer Laser
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4-kHz ArF Excimer Laser for Design Rules of up to 0.10 µm

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 5 mJ
Average Power: 20 W
Max Repetition Rate: 4000 Hz
...
Data Sheet