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Page 3 - Excimer

G41K-1H KrF 4 kHz Excimer Laser
Gigaphoton Inc.
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G41K-1H KrF 4 kHz Excimer Laser
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As the upgrade version of the second-generation model of 4-kHz excimer laser G41K, G41K-1H is mounted with a magnetic-levitation laser chamber and highly efficient line-narrowing and monitor modules on the G41K platform as standard features to achieve a high output of 40 W, one class higher than any other product. The G41K-1H has ...

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 10 mJ
Average Power: 40 W
Max Repetition Rate: 4000 Hz
...
Data Sheet
G21K 2 kHz KrF Excimer Laser
Gigaphoton Inc.
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G21K 2 kHz KrF Excimer Laser
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2 kHz KrF Excimer Laser for 0.13 µm Design Rule

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 10 mJ
Average Power: 20 W
Max Repetition Rate: 2000 Hz
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Data Sheet
G20K 2 kHz KrF Excimer Laser
Gigaphoton Inc.
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G20K 2 kHz KrF Excimer Laser
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The G20K features high energy stability (±0.4%) and a narrow spectral bandwidth (FWHM) of 0.6 pm or less to allow exposure of 0.18-µm geometries at high resolution.

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 10 mJ
Average Power: 20 W
Max Repetition Rate: 2000 Hz
...
Data Sheet
G10K 1-kHz KrF Excimer Laser
Gigaphoton Inc.
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G10K 1-kHz KrF Excimer Laser
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Stability and durability are the biggest technological challenges for an excimer laser, because it uses fluorine, high-voltage discharge, and deep UV, all of which are highly reactive. As well as stability and durability, an excimer laser light source for lithography tools requires high monochromaticity for the laser beam and high ...

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 10 mJ
Average Power: 10 W
Max Repetition Rate: 1000 Hz
...
Data Sheet
EX100 High Power ArF Excimer Laser
GAM Laser Inc.
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EX100 High Power ArF Excimer Laser
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EX100 High Power ArF Excimer Laser

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 75 mJ
Average Power: 16 W
Max Repetition Rate: 500 Hz
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Data Sheet
EX50 XeF Excimer Laser
GAM Laser Inc.
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EX50 XeF Excimer Laser
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EX50 XeF Excimer Laser

Specifications
Gas Mixture: XeF
Wavelength: 351 nm
Pulse Energy: 20 mJ
Average Power: 10 W
Max Repetition Rate: 1000 Hz
...
Data Sheet
EX50 XeCl Excimer Laser
GAM Laser Inc.
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EX50 XeCl Excimer Laser
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High Pulse Rate Excimer (XeCl) Laser

Specifications
Gas Mixture: XeCl
Wavelength: 308 nm
Pulse Energy: 22 mJ
Average Power: 10 W
Max Repetition Rate: 1000 Hz
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Data Sheet
EX50 KrF Excimer Laser
GAM Laser Inc.
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EX50 KrF Excimer Laser
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High Pulse Rate Excimer (KrF) Laser

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 50 mJ
Average Power: 20 W
Max Repetition Rate: 1000 Hz
...
Data Sheet
EX50 F2 Excimer Laser
GAM Laser Inc.
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EX50 F2 Excimer Laser
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High Pulse Rate Excimer (F2) Laser

Specifications
Gas Mixture: F2*
Wavelength: 157 nm
Pulse Energy: 2.5 mJ
Average Power: 1 W
Max Repetition Rate: 1000 Hz
...
Data Sheet
EX50 ArF Excimer Laser
GAM Laser Inc.
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EX50 ArF Excimer Laser
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High Pulse Rate Excimer (ArF) Laser

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 35 mJ
Average Power: 10 W
Max Repetition Rate: 1000 Hz
...
Data Sheet
EX10 XeF Excimer Laser
GAM Laser Inc.
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EX10 XeF Excimer Laser
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Powerful Excimer (XeF) Laser

Specifications
Gas Mixture: XeF
Wavelength: 351 nm
Pulse Energy: 6 mJ
Average Power: 1.8 W
Max Repetition Rate: 300 Hz
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Data Sheet
EX10 XeCl Excimer Laser
GAM Laser Inc.
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EX10 XeCl Excimer Laser
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Powerful Excimer Laser with superb pulse-to-pulse stability

Specifications
Gas Mixture: XeCl
Wavelength: 308 nm
Pulse Energy: 8 mJ
Average Power: 2.4 W
Max Repetition Rate: 300 Hz
...
Data Sheet
EX10 KrF Excimer Laser
GAM Laser Inc.
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EX10 KrF Excimer Laser
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Powerful Excimer laser with low trigger jitter and excellent pulse-to-pulse stability

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 10 mJ
Average Power: 3 W
Max Repetition Rate: 300 Hz
...
Data Sheet
EX10 ArF Excimer Laser
GAM Laser Inc.
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EX10 ArF Excimer Laser
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EX10 ArF Excimer Laser

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 6 mJ
Average Power: 1.8 W
Max Repetition Rate: 300 Hz
...
Data Sheet
EX5 Mini XeF Excimer Laser
GAM Laser Inc.
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EX5 Mini XeF Excimer Laser
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EX5 Mini XeF Excimer Laser

Specifications
Gas Mixture: XeF
Wavelength: 351 nm
Pulse Energy: 6 mJ
Average Power: 2.4 W
Max Repetition Rate: 1000 Hz
...
Data Sheet
EX5 Mini XeCl Excimer Laser
GAM Laser Inc.
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EX5 Mini XeCl Excimer Laser
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EX5 Mini XeCl Excimer Laser

Specifications
Gas Mixture: XeCl
Wavelength: 308 nm
Pulse Energy: 8 mJ
Average Power: 2.5 W
Max Repetition Rate: 1000 Hz
...
Data Sheet
EX5 Mini KrF Excimer Laser
GAM Laser Inc.
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EX5 Mini KrF Excimer Laser
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EX5 Mini KrF Excimer Laser

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 20 mJ
Average Power: 8 W
Max Repetition Rate: 1000 Hz
...
Data Sheet
EX5 Mini ArF Excimer Laser
GAM Laser Inc.
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EX5 Mini ArF Excimer Laser
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EX5 Mini ArF Excimer Laser

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 12 mJ
Average Power: 5 W
Max Repetition Rate: 1000 Hz
...
Data Sheet
EX5 Mini F2 Excimer Laser
GAM Laser Inc.
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EX5 Mini F2 Excimer Laser
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EX5 Mini F2 Excimer Laser

Specifications
Gas Mixture: F2*
Wavelength: 157 nm
Pulse Energy: 1.5 mJ
Average Power: 0.65 W
Max Repetition Rate: 1000 Hz
...
Data Sheet
EX5A Mini XeF Excimer Laser
GAM Laser Inc.
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EX5A Mini XeF Excimer Laser
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EX5A Mini XeF Excimer Laser

Specifications
Gas Mixture: XeF
Wavelength: 351 nm
Pulse Energy: 8 mJ
Average Power: 2.5 W
Max Repetition Rate: 1000 Hz
...
Data Sheet
EX5A Mini XeCl Excimer Laser
GAM Laser Inc.
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EX5A Mini XeCl Excimer Laser
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EX5A Mini XeCl Excimer Laser

Specifications
Gas Mixture: XeCl
Wavelength: 308 nm
Pulse Energy: 12 mJ
Average Power: 4 W
Max Repetition Rate: 1000 Hz
...
Data Sheet
EX5A Mini KrF Excimer Laser
GAM Laser Inc.
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EX5A Mini KrF Excimer Laser
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EX5A Mini KrF Excimer Laser

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 20 mJ
Average Power: 8 W
Max Repetition Rate: 1000 Hz
...
Data Sheet
EX5A Mini ArF Excimer Laser
GAM Laser Inc.
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EX5A Mini ArF Excimer Laser
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EX5A Mini ArF Excimer Laser

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 14 mJ
Average Power: 6 W
Max Repetition Rate: 1000 Hz
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Data Sheet
EX5A Mini F2 Excimer Laser
GAM Laser Inc.
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EX5A Mini F2 Excimer Laser
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EX5A Mini F2 Excimer Laser

Specifications
Gas Mixture: F2*
Wavelength: 157 nm
Pulse Energy: 1.5 mJ
Average Power: 0.3 W
Max Repetition Rate: 1000 Hz
...
Data Sheet
COMPACT EXCIMER LASER CEX-100 XeCl
LDI Innovation
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COMPACT EXCIMER LASER CEX-100 XeCl
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CEX-100 is the most compact excimer laser in its power class. It is designed as an air cooled single unit with integrated power supply, AC input line voltage, long life thyratron, single gas optics and halogen compatible construction.

Specifications
Gas Mixture: XeCl
Wavelength: 308 nm
Pulse Energy: 2.0 mJ
Average Power: 0.2 W
Max Repetition Rate: N/A Hz
...
Data Sheet