EBM20 OEM MODULE FOR SEM APPLICATIONS

The EBM20 powers E-Beam Columns in Thermionic Scanning Electron Microscopes providing acceleration, bias and filament sources in a single compact package. Spellman’s proprietary HV packaging and encapsulation technology gives dramatic improvements in size, cost and performance compared to other SEM power supply offerings. The EBM20 provides a highly regulated, low noise, ultra stable accelerator supply programmable from 0 to -20kV at 200uA. The EBM20 has floating bias and filament supplies referenced to the accelerator. Programming signals utilize differential analog inputs to minimize external noise and offset voltages effects. A ground referenced accelerator current monitor is provided. The EBM20 is arc and short circuit immune, along with over voltage and over current protection.