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Holographically produced Ibsen Phase masks offer period accuracy down to +/- 0.1 Ångström and enhance customer manufacturing performance and yield. Clear on-mask identification leads to straightforward handling in manufacturing and consequently improves operational costs for customers. A flexible specification to ...
  • Grating Periods: 400 - 2500 nm
  • Illumination Wavelengths: 193 - 800 nm
  • Period Accuracy (total): 0.02 nm
Data Sheet