Single Mirror Dual Axis Scanner

Specifications

Available Options: Non-contact measurement
Process Options: Not Specified
Applications: Semiconductors, Wafer and/or PCB inspection, Reticle inspection, Dimensional measurements, Mechanical and/or optical parts inspection, Automotive parts, Aerospace parts
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Features

  • Dual Axis Scanning Capability: The single mirror dual axis scanner provides precise control over two axes, enhancing versatility in various applications.
  • Compact Design: Small size makes it ideal for integration into space-constrained environments.
  • Durable Construction: Tested for a failure-free life of 2 million cycles, ensuring long-term reliability.
  • Smooth Motion: Axis/jewel bearing suspensions allow for smooth and precise motion.
  • Built-in Optical Sensors: Integrated sensors enable real-time monitoring and feedback.
  • Wide Deflection Angle: Offers a deflection angle of +/- 15° on both axes for extensive scanning coverage.
  • High Resonant Frequency: Operates at a resonant frequency range of 20 – 80 Hz, suitable for various dynamic applications.
  • Precision and Linearity: Linearity is maintained by a servo system, ensuring accurate performance.
  • Specifications: Dimensions are 33.5 mm (H) x 20 mm (Ø) with a mirror clear aperture of Ø5.5 mm.

Applications

  • Scanning Ellipsometry: Supports accurate thin-film measurement and material characterization.
  • Doppler Flow Meters: Enables precise velocity measurement in fluid dynamics.
  • Surface Roughness Measurement: Assists in high-resolution surface topology analysis.
  • Interferometry: Provides controlled beam scanning for interferometric setups.
  • Optical Coherence Tomography (OCT): Enhances imaging resolution with precise dual-axis scanning.