Single Mirror Dual Axis Scanner

Specifications

Available Options: Non-contact measurement
Process Options: Not Specified
Applications: Semiconductors, Wafer and/or PCB inspection, Reticle inspection, Dimensional measurements, Mechanical and/or optical parts inspection, Automotive parts, Aerospace parts
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Features


  • Dual Axis Scanning Capability: The single mirror dual axis scanner provides precise control over two axes, enhancing versatility in various applications.

  • Compact Design: Small size makes it ideal for integration into space-constrained environments.

  • Durable Construction: Tested for a failure-free life of 2 million cycles, ensuring long-term reliability.

  • Smooth Motion: Axis/jewel bearing suspensions allow for smooth and precise motion.

  • Built-in Optical Sensors: Integrated sensors enable real-time monitoring and feedback.

  • Wide Deflection Angle: Offers a deflection angle of +/- 15° on both axes for extensive scanning coverage.

  • High Resonant Frequency: Operates at a resonant frequency range of 20 – 80 Hz, suitable for various dynamic applications.

  • Precision and Linearity: Linearity is maintained by a servo system, ensuring accurate performance.

  • Specifications: Dimensions are 33.5 mm (H) x 20 mm (Ø) with a mirror clear aperture of Ø5.5 mm.

Applications


  • Scanning Ellipsometry: Supports accurate thin-film measurement and material characterization.

  • Doppler Flow Meters: Enables precise velocity measurement in fluid dynamics.

  • Surface Roughness Measurement: Assists in high-resolution surface topology analysis.

  • Interferometry: Provides controlled beam scanning for interferometric setups.

  • Optical Coherence Tomography (OCT): Enhances imaging resolution with precise dual-axis scanning.