Affordable E-Beam
Description
This is our most popular mid-size system, since the III-V and photonic device community operates at smaller wafer and batch sizes than current Si development demands, making a clean pumped, manual-loading simple system exceptionally suitable for both R&D and production. Chambers 18-22" diameter x 24-30 high usual, larger on request. CTI-8 cryo, dual-stage rotary vane forepump,one rate controller, multi-process, thermal resistance sources optional, robust PLC automation with full manual over-rides, all electropneumatic valves, ss manifold, electric hoist, variety of fixturing including rotary domes, planetaries and specialized cooled, heated, shadowing, lift-off. Liners, RGA other options.
Affordable E-Beam
Specifications |
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|---|---|
| Energy Range: | 0-0eV |
| Max Beam Current: | - uA |
| Min Beam Size: | - um |
Features
Cryo-pumped
6kW Telemark
System automation
Process automation
Flexible tooling
Very suitable GaAs, materials research, limited production
Less than $120 K!
For pricing, technical or any other questions please contact the supplier
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How to order?
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Ships from:
United States
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Sold by:
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On FindLight:
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Frequently Asked Questions
The Affordable E-Beam is mainly used for device metallization in lift-off configuration and has also been bought for innovative nano-technology applications.
The chambers in the Affordable E-Beam have a diameter of 18-22 inches and a height of 24-30 inches, with larger sizes available upon request.
The Affordable E-Beam features cryo-pumped 6kW Telemark system automation, process automation, flexible tooling, and is very suitable for GaAs and materials research, as well as limited production.
The Affordable E-Beam offers options such as thermal resistance sources, liners, and RGA, as well as a variety of fixturing including rotary domes, planetaries, and specialized cooled, heated, shadowing, and lift-off configurations.
Yes, the Affordable E-Beam is designed with simplicity and user-maintainability in mind, making it trouble-free and user-friendly for maximum uptime.