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Microfabrication

HERCULES Lithography Track System
EV Group (EVG)
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HERCULES Lithography Track System
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Based on a modular platform, the HERCULES combines EVG’s established optical mask alignment technology with integrated wafer cleaning, resist coating, baking and resist development modules. The HERCULES enables cassette-to-cassette processing of various wafer sizes.     The HERCULES safely handles thick, highly ...

Specifications
Printing Technology: Grayscale Lithography
Min XY Feature Size: 500 nm
Min Vertical Step: 1000 nm
Min Surface Roughness: 2000 nm
Area Printing Speed: -- mm^2/h
Data Sheet
EVG101 Advanced Resist Processing System
EV Group (EVG)
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EVG101 Advanced Resist Processing System
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The EVG101 resist processing system performs R&D-type processes on a single chamber design, which is fully compatible with EVG’s automated systems. The EVG101 supports wafers up to 300 mm and can be configured for spin or spray coating and developing. Conformal layers of photoresist or polymers are achieved on 3D structured ...

Specifications
Printing Technology: Grayscale Lithography
Min XY Feature Size: -- nm
Min Vertical Step: -- nm
Min Surface Roughness: -- nm
Area Printing Speed: -- mm^2/h
Data Sheet
LITHOSCALE Maskless Exposure Lithography System
EV Group (EVG)
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LITHOSCALE Maskless Exposure Lithography System
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The LITHOSCALE system featuring EV Group’s MLE™ maskless exposure technology tackles legacy bottlenecks by combining powerful digital processing that enables realtime data transfer and immediate exposure, high structuring resolution and throughput scalability. Its mask-free approach eliminates mask-related consumables, ...

Specifications
Printing Technology: Grayscale Lithography
Min XY Feature Size: 1000 nm
Min Vertical Step: -- nm
Min Surface Roughness: -- nm
Area Printing Speed: -- mm^2/h
Data Sheet
Quantum X Two-Photon Grayscale Lithography
Nanoscribe GmbH
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Quantum X Two-Photon Grayscale Lithography
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The brand-new Nanoscribe Quantum X system is designed for the microfabrication of prototypes and masters in industrial production processes. This maskless lithography system redefines the fabrication of free-form microoptics, microlens arrays and multi-level diffractive optical elements. The world’s first Two-Photon Grayscale ...

Specifications
Printing Technology: Grayscale Lithography, Two-Photon Grayscale Lithography
Min XY Feature Size: 160 nm
Min Vertical Step: 10 nm
Min Surface Roughness: 10 nm
Area Printing Speed: 3 mm^2/h
Data Sheet
There are 4 different Microfabrication from suppliers and manufacturers listed in this category. In just a few clicks you can compare different Microfabrication with each other and get an accurate quote based on your needs and specifications. Please note that the prices of Microfabrication vary significantly for different products based on various factors including technical parameters, features, brand name, etc. Please contact suppliers directly to inquire about the details and accurate pricing information for any product model. Simply navigate to the product page of interest and use the orange button to directly reach out to the respective supplier with one click.