Referenced Spectroscopic Ellipsometer Nanofilm-rse
Description
The nanofilm_RSE is a special type of ellipsometer, which compares the sample to a reference. In this way, the ellipsometric difference between sample and reference can be measured. Due to the orientation of the reference, none of the optical components need to be moved or modulated during measurement, and the full high resolution spectrum can be obtained in a single-shot measurement. This way 100 spectra per second are acquired. The synchronized x-y stage enables acquisition of large field film thickness maps within a few minutes.
The referenced spectroscopic ellipsometer combines the high sensitivity and layer thickness region of an Ellipsometer (0.1nm-10µm) with highest speed available on the market. In comparison to a laser ellipsometer it includes the spectroscopic information between 450 and 900 nm. This is important in the event that more than one parameter of the processed layer is variable like for example thickness and optical density.
Referenced Spectroscopic Ellipsometer Nanofilm-rse
Specifications |
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Spectral Range: | 450-900nm |
Spectral Resolution: | 1000 nm |
Angle Of Incidence: | 1-1deg |
Applications
- Wafer Inspection
- Thickness of Ultrathin Films and Interlayers
- Thickness homogeneity of multi layers
- Detection of Contaminants
- Thin Layers on Transparent Substrates
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Ships from:
Germany
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Frequently Asked Questions
The nanofilm_RSE is a special type of ellipsometer that compares the sample to a reference, allowing for measurement of the ellipsometric difference between the two.
The nanofilm_RSE allows for full high resolution spectrum measurement in a single-shot, with a data rate of 100 spectra per second. It also enables the acquisition of large field film thickness maps within a few minutes.
The nanofilm_RSE is suitable for applications such as wafer inspection, thickness measurement of ultrathin films and interlayers, detection of contaminants, and measurement of thin layers on transparent substrates.
Yes, the nanofilm_RSE includes spectroscopic information between 450 and 900 nm, which is important when multiple parameters of the processed layer are variable, such as thickness and optical density.
Yes, the nanofilm_RSE allows for easy and fast live fitting of layer thickness during measurement.