Nano-LR200 Piezo Nanopositioner
Description
The Nano-LR200 is designed to provide long range, single axis translation with an absolute minimum of out-of-axis motion. The unique design of the Nano- LR200 produces less than 5 nm of out-of-plane motion; measured over the entire moving platform throughout the 200 μm range of motion.
The Nano-LR200 sets the highest level of single axis precision and positioning performance. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with sub-nanometer accuracy under closed loop control.
The Nano-LR200 is ideally suited for applications that require extreme parallelism, such as metrology, AFM and MEMS.
Nano-LR200 Piezo Nanopositioner
Features
- Long range single axis piezo nanopositioner
- Less than 5 nm out of plane motion
- Low profile design
- Closed loop control
Applications
- Surface metrology
- Wafer scanning and alignment
- Optical alignment
For pricing, technical or any other questions please contact the supplier
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- No markups, no fees
- Direct contact with supplier
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How to order?
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Ships from:
United States
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Frequently Asked Questions
The Nano-LR200 is ideally suited for applications that require extreme parallelism, such as metrology, AFM, and MEMS.
The Nano-LR200 is a long range, single axis piezo nanopositioner designed to provide precise positioning performance with minimal out-of-axis motion.
The Nano-LR200 produces less than 5 nm of out-of-plane motion, measured over the entire moving platform throughout the 200 µm range of motion.
The Nano-LR200 has a range of motion of 200 µm.
The Nano-LR200 has a resolution of 0.4 nm.