SEM And FIB Integration With Scanning Probe Microscopy
Description
The AFM SEM/FIB is an award-winning SPM/NSOM system seamlessly integrated with SEM/FIB. This instrument is based on a revolutionary design that provides open access to the SEM/FIB beams for complete integration of SPM, SEM and FIB. The SPM probe does not obscure the electronic or ion beam axis and also sits at the eucentric point, enabling the SPM to rotate into position while either the electron or ion beam is in operation.
SEM And FIB Integration With Scanning Probe Microscopy
Specifications |
|
|---|---|
| Max Sample Size: | 0.014 mm |
| Min Working Distance: | -- mm |
| Scan Range (X): | 0.35 um |
| Scan Range (Y): | 0.35 um |
| Scan Range (Z): | 0.35 um |
Features
- Simultaneous imaging of surfaces with SEM/SPM
- True 3-D functional imaging by taking advantage of ion beam milling
- Excellent X,Y resolution of SEM coupled with ultimate Z resolution in SPM
- NSOM imaging within an SEM
- Large field of view screening with SEM, followed by high resolution SPM imaging
- Functional nanoscale imaging taking advantage of SPM/NSOM imaging (e.g. cathodoluminescence, electrical, force)
- Innovative probe design that does not interfere with electron axis
- Multiprobe SPM Imaging and manipulation
- Unique AFM capabilities of Deep Trench Profiling and Side Wall Imaging
- Super-resolution optical imaging inside SEM/FIB such as cathodoluminescence
For pricing, technical or any other questions please contact the supplier
- No registration required
- No markups, no fees
- Direct contact with supplier
Contact Supplier
How to order?
-
Ships from:
Israel
-
Sold by:
-
On FindLight:
External Vendor
Claim Nanonics Imaging Ltd Page to edit and add data
Frequently Asked Questions
The AFM SEM/FIB system has excellent X,Y resolution of SEM coupled with ultimate Z resolution in SPM, NSOM imaging within an SEM, large field of view screening with SEM, followed by high resolution SPM imaging, and innovative probe design that does not interfere with electron axis. It also has multiprobe SPM imaging and manipulation, and super-resolution optical imaging inside SEM/FIB such as cathodoluminescence.
The AFM SEM/FIB is an award-winning SPM/NSOM system seamlessly integrated with SEM/FIB. It allows for simultaneous imaging of surfaces with SEM/SPM and true 3-D functional imaging by taking advantage of ion beam milling.
The combined capabilities of having an SPM in a SEM/FIB offer the user much more than the sum of having a stand alone AFM or SEM/FIB. It allows for functional nanoscale imaging taking advantage of SPM/NSOM imaging (e.g. cathodoluminescence, electrical, force) and the unique AFM capabilities of Deep Trench Profiling and Side Wall Imaging.
The NanoToolKit of probes is a variety of probes designed with full exposure and complete view of the probe tip. This variety of probes brings unique probe features with singular capabilities to the SEM/FIB such as optical, thermal and other functional properties with full SEM/FIB integration.
The SPM DB is a door mounted on the sample stage of the Dual Beam (DB) and rotated from the FIB to allow for AFM capabilities of Deep Trench Profiling and Side Wall Imaging.