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- SEM And FIB Integration With Scanning Probe Microscopy
SEM And FIB Integration With Scanning Probe Microscopy
OVERVIEW
The AFM SEM/FIB is an award-winning SPM/NSOM system seamlessly integrated with SEM/FIB. This instrument is based on a revolutionary design that provides open access to the SEM/FIB beams for complete integration of SPM, SEM and FIB. The SPM probe does not obscure the electronic or ion beam axis and also sits at the eucentric point, enabling the SPM to rotate into position while either the electron or ion beam is in operation.
SPECIFICATION
- Max Sample Size: 0.014 mm
- Min Working Distance: -- mm
- Scan Range (X): 0.35 um
- Scan Range (Y): 0.35 um
- Scan Range (Z): 0.35 um
KEY FEATURES
- Simultaneous imaging of surfaces with SEM/SPM
- True 3-D functional imaging by taking advantage of ion beam milling
- Excellent X,Y resolution of SEM coupled with ultimate Z resolution in SPM
- NSOM imaging within an SEM
- Large field of view screening with SEM, followed by high resolution SPM imaging
- Functional nanoscale imaging taking advantage of SPM/NSOM imaging (e.g. cathodoluminescence, electrical, force)
- Innovative probe design that does not interfere with electron axis
- Multiprobe SPM Imaging and manipulation
- Unique AFM capabilities of Deep Trench Profiling and Side Wall Imaging
- Super-resolution optical imaging inside SEM/FIB such as cathodoluminescence
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