DPT-E20 Closed Loop Actuator
Description
Precision, accuracy and speed for the best in nanopositioning. The DPT-E range of actuators are designed with capacitive feedback control to give precise positioning. DPT-E actuators are ideal for the most demanding applications. The actuators are capable of moving loads of up to 60 kg over their full travel range. Low electronic noise and high linearity, give confidence that the actuator is positioned with precision, speed and accuracy. The super invar construction provides high thermal stability and gives superior positional stability. The DPT-E is a low voltage replacement for the high voltage DPT-C range of actuators. The dimensions are identical to the DPT-C range with travel ranges which have increased by at least 25% and dynamic performance is enhanced.
DPT-E20 Closed Loop Actuator
Specifications |
|
|---|---|
| Microstep Size (default Resolution): | 0.00009 um |
| Built-in Controller: | Yes |
| Travel Range: | 0.026 mm |
| Accuracy (unidirectional): | -- um |
| Backlash: | Not Specified |
| Maximum Speed: | -- mm/s |
| Minimum Speed: | -- mm/s |
| Axes Of Motion: | Three |
Features
Preloaded super-invar construction
Capacitive sensor feedback control
High blocking force
Plug and play inter-changeability
Friction free positioning providing sub nanometer repeatability
UHV, radiation hard / cryogenic non-magnetic and high temperature variants
Applications
Interferometry
Beam alignment
Mask wafer chuck alignment
Cavity tuning
Metrology
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Frequently Asked Questions
The key features of the DPT-E actuators include preloaded super-invar construction, capacitive sensor feedback control, high blocking force, plug and play inter-changeability, friction-free positioning providing sub-nanometer repeatability, and UHV, radiation hard/cryogenic non-magnetic and high temperature variants.
The typical applications of the DPT-E actuators include interferometry, beam alignment, mask wafer chuck alignment, cavity tuning, and metrology.
The NPC-D-5200 Digital Controller and NPC-D-6330 Multi-channel Closed Loop Controller are suggested for use with the DPT-E actuators.
The DPT-E20 Closed Loop Actuator is a precision instrument designed for nanopositioning with capacitive feedback control for precise positioning.
The DPT-E actuators are capable of moving loads of up to 60 kg over their full travel range.