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LIGHTSpEED Unpatterned Surface Inspection Solution
FOGALE Nanotech
The LIGHTSpEED is the first unpatterned surface inspection solution that combines darkfield inspection and advanced Synchronous Doppler Detection Technology to capture nanometer scale defects on all kind of wafers. As a part of the modular LIGHTsEE series from UnitySC the LIGHTSpEED can be used as a stand-alone tool or as part of a ...
Data Sheet
TMAP-AP Metrology Solution For 3D IC-TSV Process Control
FOGALE Nanotech
The TMAP-AP  is the complete metrology solution for 3D IC/TSV process control with the best balance between performance, throughput and cost of ownership (CoO). The TMAP-AP measure multiple layer stacks and differentiate them in the order they are placed. Even under highly warped conditions, the TMAP Series’ state of ...
Data Sheet
TMAP NST3D Non-Contact Full Field Metrology Solution
FOGALE Nanotech
The TMAP NST is a non contact full field metrology solution based on optical microscopy enabling surface topography measurements at the nano scale. The TMAP NST  is pushing the boundaries of conventional microscopy with performances that stretch beyond contact profilometry and into the AFM space.
Data Sheet
Candela 8520 High Sensitivity High Throughput Wafer Inspection Tool
KLA-Tencor
The Candela® 8520 2nd generation integrated surface and photoluminescence inspection system is designed for advanced characterization of substrate and epitaxial defects for the power device market and related applications. Implementation of automated wafer inspection with statistical process control (SPC) methodology can ...
Data Sheet
Candela 8720 High Sensitivity Wafer Inspectiont Tool
KLA-Tencor
The Candela® 8720 advanced surface inspection system captures a variety of mission-critical substrate and epitaxial defects for the LED, photonics, communications and other compound semiconductor markets. Implementation of automated wafer inspection with statistical process control (SPC) methodology can significantly cut yield ...
Data Sheet
Candela 8420 Optical Surface Analyzer
KLA-Tencor
The Candela® 8420 system serves the photonics, LED, commu- nications and other compound semiconductor markets. Candela 8420 uses classic Candela technology of multi-channel detection and rule-based defect binning to perform advanced inspection for determination of yield impacting defects on blanket wafers across multiple material ...
Data Sheet