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Candela 8520 High Sensitivity High Throughput Wafer Inspection Tool
KLA-Tencor
The Candela® 8520 2nd generation integrated surface and photoluminescence inspection system is designed for advanced characterization of substrate and epitaxial defects for the power device market and related applications. Implementation of automated wafer inspection with statistical process control (SPC) methodology can ...
Data Sheet
Candela 8720 High Sensitivity Wafer Inspectiont Tool
KLA-Tencor
The Candela® 8720 advanced surface inspection system captures a variety of mission-critical substrate and epitaxial defects for the LED, photonics, communications and other compound semiconductor markets. Implementation of automated wafer inspection with statistical process control (SPC) methodology can significantly cut yield ...
Data Sheet
Candela 8420 Optical Surface Analyzer
KLA-Tencor
The Candela® 8420 system serves the photonics, LED, commu- nications and other compound semiconductor markets. Candela 8420 uses classic Candela technology of multi-channel detection and rule-based defect binning to perform advanced inspection for determination of yield impacting defects on blanket wafers across multiple material ...
Data Sheet