Lidiz Vacum Technological System
Description
Vacuum coating equipment Lidiz allows to achieve coatings with low scattering and high laser induced damage threshold.Vacuum technological system LIDIZ is an effective system for deposition of precision optical coatings for a wide range of applications. The LIDIZ vacuum system is equipped with a high-frequency grid ion-beam sputtering source, high-frequency grid ion-beam source for substrates pre-cleaning, surface activation and sputtering assisting and high-frequency neutralizer. LIDIZ system helps to obtain thin films of from a variety of materials with high accuracy and excellent quality. Spectral optical control allows to make the processes fully automatic and increase the yield significantly. The system is intended both for R&D and small-scale production. The system is implemented with dry pumping system, ensuring high purity of the working processes.
Lidiz Vacum Technological System
Features
High-frequency ion-beam grid sources for the sputtering, pre-cleaning, surface activation and
sputtering assisting
Loud-lock chamber with robotic arm
Disc or planetary substrate holders
Spectral or single wave optical monitoring system from UV to mid-IR range with coating re-optimization during the process
Innovative holder for 4 targets per process with a mechanism of rotation and horizontal move during the sputtering
Integration into a clean room
For pricing, technical or any other questions please contact the supplier
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Ships from:
Lithuania
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Frequently Asked Questions
The Lidiz vacuum coating equipment is designed to achieve coatings with low scattering and high laser induced damage threshold.
The LIDIZ system features high-frequency ion-beam grid sources for sputtering, pre-cleaning, surface activation, and sputtering assisting. It also includes a loud-lock chamber with a robotic arm, disc or planetary substrate holders, and a spectral or single wave optical monitoring system.
The LIDIZ system can be used with a variety of materials to obtain thin films with high accuracy and excellent quality.
Yes, the LIDIZ system is intended for both R&D and small-scale production.
The ultimate vacuum in the clean process chamber of the LIDIZ system is 5•10^-4 Pa.