CLS5000 Series Excimer Laser
Description
CLS5000 is a compact 193 nm compact excimer laser. It is also available in different configurations with 248 nm and 308 nm wavelengths. It has an outstanding beam stability performance because of its extra features in positioning and pointing, which makes CLS5000 a great solution for a number of different applications. This short wavelength laser has high repetition rate, which is very important for material ablation processes optical projection lithography using photomasks. Magnetic switch generator and builtin energy monitor makes Optromix CLS5000 very user friendly and convenient.
CLS5000 Series Excimer Laser
Specifications |
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|---|---|
| Gas Mixture: | ArF, KrF, XeCl |
| Wavelength: | 193 nm, 248 nm, 308 nm |
| Pulse Energy: | 15 mJ |
| Average Power: | 7.5 W |
| Max Repetition Rate: | 500 Hz |
| Pulse Duration: | 11 ns |
Features
● Very high beam position stability
● Very high beam pointing stability
● High repetition rate
● Magnetic switch generator
● Compact excimer laser
● Built-in Energy monitor
● Energy stabilization
Applications
● Spectroscopy
● FBG writing
● Material processing
● Micromarking
● DUV Lithography
For pricing, technical or any other questions please contact the supplier
- No registration required
- No markups, no fees
- Direct contact with supplier
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How to order?
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Ships from:
United States
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Sold by:
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On FindLight:
since 2015
Frequently Asked Questions
The key features of the CLS5000 excimer laser include very high beam position stability, very high beam pointing stability, high repetition rate, magnetic switch generator, compact size, built-in energy monitor, and energy stabilization.
The CLS5000 excimer laser is suitable for a range of applications, including spectroscopy, FBG writing, material processing, micromarking, and DUV lithography.
The CLS5000 excimer laser has a wavelength of 193 nm, but it is also available in configurations with 248 nm and 308 nm wavelengths.
The CLS5000 excimer laser has outstanding beam stability performance due to its extra features in positioning and pointing.
The CLS5000 excimer laser is user-friendly thanks to its magnetic switch generator and built-in energy monitor.