ATL Lasertechnik GmbH
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Frequently Asked Questions

Yes, the ATLEX S KrF Excimer Laser meets European CE-standard and RoHS compliance.

The ATLEX S KrF Excimer Laser features a compact size, soft corona preionization, HV-solid state pulser, integrated vacuum pump and halogen filter, air-cooled active thermal management, and various interface options for system integration.

The ATLEX S KrF Excimer Laser is a UV-light source designed for low- and mid-range duty cycle S applications.

The laser head volume of the ATLEX S KrF Excimer Laser is less than 3 liters.

The ATLEX S KrF Excimer Laser has an energy stabilization mode.

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