VOLCANO LB 750UV Laser Optics
Description
VOLCANO LB 750UV Laser Optics is a Laser Lift-Off system designed with different line lengths of up to 750mm and 1000mm. The use of solid-state lasers emitting UV light at 343nm reduces the operating costs and increases the uptime of production tools remarkably, compared to systems using excimer lasers.
The LB systems are based on a rigid aluminum housing structure and the FALCON XXL projection lens gives a working distance of >200mm. A stable and solid system structure is needed to support the line beam optics. Line Beam Optics include an MBC (Manual Beam Control) camera system which allows to control and adjust position and angle of all laser emitted beams.
VOLCANO LB 750UV Laser Optics
Specifications |
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|---|---|
| Laser Source: | DPSS |
| Wavelength: | 343 nm |
| Laser Output Power: | -- W |
| Laser Pulse Energy: | 370 mJ |
| Laser Pulse Duration: | 15 ns |
| Laser Repetition Rate: | 10000 Hz |
| X-Axis Range: | 750 mm |
| Y-Axis Range: | 750 mm |
| Laser Line Length: | 750 mm |
| Laser Line Width: | 20 um |
| Homogeneity: | p2p ≤ 6% best focus |
Features
The FALCON XXL design contains a window which seals the optics from the process chamber and protects against contaminations from the process.
The energy density of >500mJ/cm2 is obtained by using 6 TruMicro 8320 (20mJ specification) with 750mm x 20μm FWHM line beam. The Line Beam optics give a DoF ≥300μm for a 20μm FWHM small axis and a uniformity of p2p ≤10%.
For pricing, technical or any other questions please contact the supplier
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How to order?
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Ships from:
Germany
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Sold by:
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On FindLight:
External Vendor
Innovavent GmbH
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Frequently Asked Questions
The VOLCANO LB 750UV Laser Optics system can be designed with line lengths of up to 750mm and 1000mm.
Solid-state lasers emitting UV light at 343nm reduce operating costs compared to systems using excimer lasers.
The FALCON XXL projection lens provides a working distance of over 200mm.
The Line Beam optics achieve an energy density of over 500mJ/cm2.
The Line Beam optics provide a depth of focus (DoF) of at least 300μm for a 20μm FWHM small axis.