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VOLCANO LB 750UV Laser Optics
Innovavent GmbH
VOLCANO® Line Beam systems can be designed with different line lengths up to 750mm and 1000mm. The use of solid state lasers emitting UV light at 343nm reduces the operating costs and increases the uptime of production tools remarkably, compared to systems using excimer lasers. The LB systems are based on a rigid aluminum ...
  • Max Substrate Size: 750 mm
  • Laser Source: Ultrafast UV
Data Sheet
VOLCANO 300UV Laser Optics
Innovavent GmbH
The VOLCANO® 300UV Laser Optics is built into a solid granite structure. Two laser beams can be combined to obtain high energy density. The beams are processed by independent telescopes and combined by a specially designed homogenizer. The combined laser beams are homogenized into a 300mm long line beam with a typical width of 20 ...
  • Max Substrate Size: 300 mm
  • Laser Source: Ultrafast UV
Data Sheet
VOLCANO 100UV Laser Optics
Innovavent GmbH
The VOLCANO® 100UV Laser Optics is built into a solid granite structure. The beam is homogenized into a 100mm long line beam with a typical width of 20 - 30μm. The FALCON 100UV projection lens assures a uniform line width and the large depth of focus which trouble-free production requires. A single TruMicro 8320 laser (200W, ...
  • Max Substrate Size: 100 mm
  • Laser Source: Ultrafast UV
Data Sheet
microMIRA High Throughput Laser Lift-Off System
3D Micromac
3D-Micromac’s brand-new laser LLO system provides highly uniform, force-free lift-off of flexible layers on wafers and large surface areas (up to GEN 6) and at high processing speeds. The system is built on a highly customizable platform that can incorporate different laser sources, wavelengths and beam paths to meet each customer’s ...
  • Max Substrate Size: 200 mm
  • Laser Source: Excimer
Data Sheet